• 1355 Citations
  • 20 h-Index
19962020

Research output per year

If you made any changes in Pure these will be visible here soon.

Research Output

Article

Application of wide angle beam spectroscopic ellipsometry for quality control in solar cell production

Major, C., Juhász, G., Petrik, P., Horváth, Z., Polgár, O. & Fried, M., aug. 25 2009, In : Vacuum. 84, 1, p. 119-122 4 p.

Research output: Article

13 Citations (Scopus)

Approaches to calculate the dielectric function of ZnO around the band gap

Agocs, E., Fodor, B., Pollakowski, B., Beckhoff, B., Nutsch, A., Jank, M. & Petrik, P., nov. 28 2014, In : Thin Solid Films. 571, P3, p. 684-688 5 p.

Research output: Article

14 Citations (Scopus)
10 Citations (Scopus)

Changes in composite nc-Si-SiO2 thin films caused by 20 MeV electron irradiation

Nesheva, D., Petrik, P., Hristova-Vasileva, T., Fogarassy, Z., Kalas, B., Šćepanović, M., Kaschieva, S., Dmitriev, S. N. & Antonova, K., jan. 1 2019, In : Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms.

Research output: Article

9 Citations (Scopus)

Characterisation of ultra-shallow disorder profiles and dielectric functions in ion implanted Si

Mohacsi, I., Petrik, P., Fried, M., Lohner, T., Van Den Berg, J. A., Reading, M. A., Giubertoni, D., Barozzi, M. & Parisini, A., febr. 28 2011, In : Thin Solid Films. 519, 9, p. 2847-2851 5 p.

Research output: Article

2 Citations (Scopus)

Characterization of damage structure in ion implanted SiC using high photon energy synchrotron ellipsometry

Petrik, P., Zolnai, Z., Polgar, O., Fried, M., Betyak, Z., Agocs, E., Lohner, T., Werner, C., Röppischer, M. & Cobet, C., febr. 28 2011, In : Thin Solid Films. 519, 9, p. 2791-2794 4 p.

Research output: Article

2 Citations (Scopus)

Characterization of different porous silicon structures by spectroscopic ellipsometry

Fried, M., Lohner, T., Polgár, O., Petrik, P., Vázsonyi, É., Bársony, I., Piel, J. P. & Stehle, J. L., ápr. 15 1996, In : Thin Solid Films. 276, 1-2, p. 223-227 5 p.

Research output: Article

50 Citations (Scopus)

Characterization of in-depth cavity distribution after thermal annealing of helium-implanted silicon and gallium nitride

Fodor, B., Cayrel, F., Agocs, E., Alquier, D., Fried, M. & Petrik, P., nov. 28 2014, In : Thin Solid Films. 571, P3, p. 567-572 6 p.

Research output: Article

2 Citations (Scopus)
1 Citation (Scopus)
11 Citations (Scopus)
24 Citations (Scopus)

Characterization of ZnO structures by optical and X-ray methods

Petrik, P., Pollakowski, B., Zakel, S., Gumprecht, T., Beckhoff, B., Lemberger, M., Labadi, Z., Baji, Z., Jank, M. & Nutsch, A., szept. 15 2013, In : Applied Surface Science. 281, p. 123-128 6 p.

Research output: Article

5 Citations (Scopus)
20 Citations (Scopus)
2 Citations (Scopus)

Comparative measurements on atomic layer deposited Al2O 3 thin films using ex situ table top and mapping ellipsometry, as well as X-ray and VUV reflectometry

Petrik, P., Gumprecht, T., Nutsch, A., Roeder, G., Lemberger, M., Juhasz, G., Polgar, O., Major, C., Kozma, P., Janosov, M., Fodor, B., Agocs, E. & Fried, M., aug. 31 2013, In : Thin Solid Films. 541, p. 131-135 5 p.

Research output: Article

9 Citations (Scopus)
20 Citations (Scopus)
14 Citations (Scopus)
38 Citations (Scopus)
81 Citations (Scopus)

Complementary methodologies for thin film characterization in one tool-a novel instrument for 450 mm wafers

Holfelder, I., Beckhoff, B., Fliegauf, R., Hönicke, P., Nutsch, A., Petrik, P., Roeder, G. & Weser, J., ápr. 2013, In : Journal of analytical atomic spectrometry. 28, 4, p. 549-557 9 p.

Research output: Article

3 Citations (Scopus)
Open Access

Composition and thickness of RF sputtered amorphous silicon alloy films

Lohner, T., Serényi, M., Basa, D. K., Khánh, N. Q., Nemcsics, Á., Petrik, P. & Turmezei, P., dec. 1 2008, In : Acta Polytechnica Hungarica. 5, 2, p. 23-30 8 p.

Research output: Article

2 Citations (Scopus)

Determination of the complex dielectric function of ion-implanted amorphous germanium by spectroscopic ellipsometry

Lohner, T., Szilágyi, E., Zolnai, Z., Németh, A., Fogarassy, Z., Illés, L., Kótai, E., Petrik, P. & Fried, M., máj. 1 2020, In : Coatings. 10, 5, 480.

Research output: Article

Open Access
5 Citations (Scopus)

Dielectric function of disorder in high-fluence helium-implanted silicon

Petrik, P., Fried, M., Lohner, T., Khánh, N. Q., Basa, P., Polgár, O., Major, C., Gyulai, J., Cayrel, F. & Alquier, D., dec. 1 2006, In : Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 253, 1-2, p. 192-195 4 p.

Research output: Article

7 Citations (Scopus)

Doping silica beyond limits with laser plasma for active photonic materials

Chandrappan, J., Murray, M., Petrik, P., Agocs, E., Zolnai, Z., Tempez, A., Legendre, S., Steenson, D. P., Jha, A. & Jose, G., 2015, In : Optical Materials Express. 5, 12, p. 2849-2861 13 p.

Research output: Article

11 Citations (Scopus)
9 Citations (Scopus)

Electrical and structural properties of ultrathin SiON films on Si prepared by plasma nitridation

Hourdakis, E., Nassiopoulou, A. G., Parisini, A., Reading, M. A., Van Den Berg, J. A., Sygellou, L., Ladas, S., Petrik, P., Nutsch, A., Wolf, M. & Roeder, G., jan. 1 2011, In : Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 29, 2, 022201.

Research output: Article

2 Citations (Scopus)
4 Citations (Scopus)

Ellipsometric and X-Ray Spectrometric Investigation of Fibrinogen Protein Layers

Kalas, B., Pollakowski, B., Nutsch, A., Streeck, C., Nador, J., Fried, M., Beckhoff, B. & Petrik, P., dec. 1 2017, In : Physica Status Solidi (C) Current Topics in Solid State Physics. 14, 12, 1700210.

Research output: Article

1 Citation (Scopus)

Ellipsometric characterization of damage profiles using an advanced optical model

Petrik, P., Polgár, O., Fried, M., Lohner, T., Khánh, N. Q. & Gyulai, J., febr. 15 2003, In : Journal of Applied Physics. 93, 4, p. 1987-1990 4 p.

Research output: Article

28 Citations (Scopus)

Ellipsometric characterization of nanocrystals in porous silicon

Petrik, P., Fried, M., Vázsonyi, É., Lohner, T., Horváth, E., Polgár, O., Basa, P., Bársony, I. & Gyulai, J., okt. 31 2006, In : Applied Surface Science. 253, 1 SPEC. ISS., p. 200-203 4 p.

Research output: Article

15 Citations (Scopus)

Ellipsometric characterization of SiOx films with embedded Si nanoparticles

Szekeres, A., Vlaikova, E., Lohner, T., Petrik, P., Huhn, G., Havancsak, K., Lisovskyy, I., Zlobin, S., Indutnyy, I. Z. & Shepeliavyi, P. E., aug. 25 2009, In : Vacuum. 84, 1, p. 115-118 4 p.

Research output: Article

5 Citations (Scopus)
12 Citations (Scopus)

Ellipsometric study of crystalline silicon hydrogenated by plasma immersion ion implantation

Szekeres, A., Alexandrova, S., Petrik, P., Fodor, B. & Bakalova, S., szept. 15 2013, In : Applied Surface Science. 281, p. 105-108 4 p.

Research output: Article

3 Citations (Scopus)

Ellipsometric study of polycrystalline silicon films prepared by low-pressure chemical vapor deposition

Petrik, P., Lohner, T., Fried, M., Biró, L. P., Khánh, N. Q., Gyulai, J., Lehnert, W., Schneider, C. & Ryssel, H., febr. 2000, In : Journal of Applied Physics. 87, 4, p. 1734-1742 9 p.

Research output: Article

54 Citations (Scopus)
10 Citations (Scopus)

Evaluation strategies for multi-layer, multi-material ellipsometric measurements

Polgár, O., Petrik, P., Lohner, T. & Fried, M., okt. 31 2006, In : Applied Surface Science. 253, 1 SPEC. ISS., p. 57-64 8 p.

Research output: Article

15 Citations (Scopus)

Expanded beam (macro-imaging) ellipsometry

Fried, M., Juhász, G., Major, C., Petrik, P., Polgár, O., Horváth, Z. & Nutsch, A., febr. 28 2011, In : Thin Solid Films. 519, 9, p. 2730-2736 7 p.

Research output: Article

20 Citations (Scopus)
8 Citations (Scopus)

Fourier ellipsometry - An ellipsometric approach to Fourier scatterometry

Petrik, P., Kumar, N., Fried, M., Fodor, B., Juhasz, G., Pereira, S. F., Burger, S. & Urbach, H. P., jan. 29 2015, In : Journal of the European Optical Society. 10, 15002.

Research output: Article

6 Citations (Scopus)

Grating coupled optical waveguide interferometry combined with in situ spectroscopic ellipsometry to monitor surface processes in aqueous solutions

Agocs, E., Kozma, P., Nador, J., Hamori, A., Janosov, M., Kalas, B., Kurunczi, S., Fodor, B., Ehrentreich-Förster, E., Fried, M., Horváth, R. & Petrik, P., jún. 15 2016, (Accepted/In press) In : Applied Surface Science.

Research output: Article

3 Citations (Scopus)
13 Citations (Scopus)

High-quality PMMA/ZnO NWs piezoelectric coating on rigid and flexible metallic substrates

Chelu, M., Stroescu, H., Anastasescu, M., Calderon-Moreno, J. M., Preda, S., Stoica, M., Fogarassy, Z., Petrik, P., Gheorghe, M., Parvulescu, C., Brasoveanu, C., Dinescu, A., Moldovan, C. & Gartner, M., nov. 1 2020, In : Applied Surface Science. 529, 147135.

Research output: Article

High-speed imaging/mapping spectroscopic ellipsometry for in-line analysis of roll-to-roll thin-film photovoltaics

Shan, A., Fried, M., Juhász, G., Major, C., Polgár, O., Németh, Á., Petrik, P., Dahal, L. R., Chen, J., Huang, Z., Podraza, N. J. & Collins, R. W., jan. 2014, In : IEEE Journal of Photovoltaics. 4, 1, p. 355-361 7 p., 6644259.

Research output: Article

24 Citations (Scopus)
16 Citations (Scopus)

Influence of 20 MeV electron irradiation on the optical properties and phase composition of SiOx thin films

Hristova-Vasileva, T., Petrik, P., Nesheva, D., Fogarassy, Z., Lábár, J., Kaschieva, S., Dmitriev, S. N. & Antonova, K., máj. 21 2018, In : Journal of Applied Physics. 123, 19, 195303.

Research output: Article

2 Citations (Scopus)
1 Citation (Scopus)