• 1355 Citations
  • 20 h-Index
19962020

Research output per year

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Research Output

Advanced optical model for the ellipsometric study of ion implantation-caused damage depth profiles in single-crystalline silicon

Petrik, P., Polgár, O., Fried, M., Lohner, T., Khánh, N. Q. & Gyulai, J., dec. 1 2000, 2000 International Conference on Ion Implantation Technology, IIT 2000 - Proceedings. p. 151-154 4 p. 924112. (Proceedings of the International Conference on Ion Implantation Technology).

Research output: Conference contribution

1 Citation (Scopus)

Annealing effect on optical barrier in ion-implanted tellurite glass waveguides

Berneschi, S., Cacciari, I., Nunzi Conti, G., Pelli, S., Righini, G. C., Bányász, I., Khanh, N. Q., Lohner, T., Petrik, P., Zolnai, Z., Bettinelli, M., Speghini, A., Mescia, L. & Prudenzano, F., jún. 15 2009, Integrated Optics: Devices, Materials, and Technologies XIII. 721807. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 7218).

Research output: Conference contribution

3 Citations (Scopus)

Application of a dual-spectral-range, divergent-beam spectroscopic ellipsometer for high-speed mapping of large-area, laterally-inhomogeneous, photovoltaic multilayers

Fried, M., Juhasz, G., Major, C., Nemeth, A., Petrik, P., Polgar, O., Salupo, C., Dahal, L. R. & Collins, R. W., jan. 1 2012, Advanced Materials Processing for Scalable Solar-Cell Manufacturing. p. 157-162 6 p. (Materials Research Society Symposium Proceedings; vol. 1323).

Research output: Conference contribution

7 Citations (Scopus)

Application of wide angle beam spectroscopic ellipsometry for quality control in solar cell production

Major, C., Juhász, G., Petrik, P., Horváth, Z., Polgár, O. & Fried, M., aug. 25 2009, In : Vacuum. 84, 1, p. 119-122 4 p.

Research output: Article

13 Citations (Scopus)

Approaches to calculate the dielectric function of ZnO around the band gap

Agocs, E., Fodor, B., Pollakowski, B., Beckhoff, B., Nutsch, A., Jank, M. & Petrik, P., nov. 28 2014, In : Thin Solid Films. 571, P3, p. 684-688 5 p.

Research output: Article

14 Citations (Scopus)

Atomic layer deposited Al 2O 3 as characterized reference samples for nanolayer metrology

Nutsch, A., Lemberger, M. & Petrik, P., dec. 1 2011, Frontiers of Characterization and Metrology for Nanoelectronics: 2011. p. 193-197 5 p. (AIP Conference Proceedings; vol. 1395).

Research output: Conference contribution

1 Citation (Scopus)
10 Citations (Scopus)

Changes in composite nc-Si-SiO2 thin films caused by 20 MeV electron irradiation

Nesheva, D., Petrik, P., Hristova-Vasileva, T., Fogarassy, Z., Kalas, B., Šćepanović, M., Kaschieva, S., Dmitriev, S. N. & Antonova, K., jan. 1 2019, In : Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms.

Research output: Article

9 Citations (Scopus)

Characterisation of slab waveguides, fabricated in CaF2 and Er-doped tungsten-tellurite glass by MeV energy N+ ion implantation, using spectroscopic ellipsometry and m-line spectroscopy

Bányász, I., Berneschi, S., Lohner, T., Fried, M., Petrik, P., Khanh, N. Q., Zolnai, Z., Watterich, A., Bettinelli, M., Brenci, M., Nunzi-Conti, G., Pelli, S., Righini, G. C. & Speghini, A., júl. 23 2010, Silicon Photonics and Photonic Integrated Circuits II. 77190G. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 7719).

Research output: Conference contribution

1 Citation (Scopus)

Characterisation of ultra-shallow disorder profiles and dielectric functions in ion implanted Si

Mohacsi, I., Petrik, P., Fried, M., Lohner, T., Van Den Berg, J. A., Reading, M. A., Giubertoni, D., Barozzi, M. & Parisini, A., febr. 28 2011, In : Thin Solid Films. 519, 9, p. 2847-2851 5 p.

Research output: Article

2 Citations (Scopus)

Characterization of damage structure in ion implanted SiC using high photon energy synchrotron ellipsometry

Petrik, P., Zolnai, Z., Polgar, O., Fried, M., Betyak, Z., Agocs, E., Lohner, T., Werner, C., Röppischer, M. & Cobet, C., febr. 28 2011, In : Thin Solid Films. 519, 9, p. 2791-2794 4 p.

Research output: Article

2 Citations (Scopus)

Characterization of different porous silicon structures by spectroscopic ellipsometry

Fried, M., Lohner, T., Polgár, O., Petrik, P., Vázsonyi, É., Bársony, I., Piel, J. P. & Stehle, J. L., ápr. 15 1996, In : Thin Solid Films. 276, 1-2, p. 223-227 5 p.

Research output: Article

50 Citations (Scopus)

Characterization of in-depth cavity distribution after thermal annealing of helium-implanted silicon and gallium nitride

Fodor, B., Cayrel, F., Agocs, E., Alquier, D., Fried, M. & Petrik, P., nov. 28 2014, In : Thin Solid Films. 571, P3, p. 567-572 6 p.

Research output: Article

2 Citations (Scopus)
1 Citation (Scopus)
11 Citations (Scopus)

Characterization of Ru and RuO2 thin films prepared by pulsed metal organic chemical vapor deposition

Roeder, G., Manke, C., Baumann, P. K., Petersen, S., Yanev, V., Gschwandtner, A., Ruhl, G., Petrik, P., Schellenberger, M., Pfitzner, L. & Ryssel, H., dec. 1 2008, In : Physica Status Solidi (C) Current Topics in Solid State Physics. 5, 5, p. 1231-1234 4 p.

Research output: Conference article

2 Citations (Scopus)
24 Citations (Scopus)

Characterization of thin ZnO films by vacuum ultra-violet reflectometry

Gumprecht, T., Petrik, P., Roeder, G., Schellenberger, M., Pfitzner, L., Pollakowski, B. & Beckhoff, B., 2013, Oxide Semiconductors and Thin Films. p. 65-70 6 p. (Materials Research Society Symposium Proceedings; vol. 1494).

Research output: Conference contribution

1 Citation (Scopus)

Characterization of ZnO structures by optical and X-ray methods

Petrik, P., Pollakowski, B., Zakel, S., Gumprecht, T., Beckhoff, B., Lemberger, M., Labadi, Z., Baji, Z., Jank, M. & Nutsch, A., szept. 15 2013, In : Applied Surface Science. 281, p. 123-128 6 p.

Research output: Article

5 Citations (Scopus)
20 Citations (Scopus)
2 Citations (Scopus)

Comparative measurements on atomic layer deposited Al2O 3 thin films using ex situ table top and mapping ellipsometry, as well as X-ray and VUV reflectometry

Petrik, P., Gumprecht, T., Nutsch, A., Roeder, G., Lemberger, M., Juhasz, G., Polgar, O., Major, C., Kozma, P., Janosov, M., Fodor, B., Agocs, E. & Fried, M., aug. 31 2013, In : Thin Solid Films. 541, p. 131-135 5 p.

Research output: Article

9 Citations (Scopus)
20 Citations (Scopus)
14 Citations (Scopus)
38 Citations (Scopus)
81 Citations (Scopus)

Complementary methodologies for thin film characterization in one tool-a novel instrument for 450 mm wafers

Holfelder, I., Beckhoff, B., Fliegauf, R., Hönicke, P., Nutsch, A., Petrik, P., Roeder, G. & Weser, J., ápr. 2013, In : Journal of analytical atomic spectrometry. 28, 4, p. 549-557 9 p.

Research output: Article

3 Citations (Scopus)

Complementary metrology within a European joint laboratory

Nutsch, A., Beckhoff, B., Altmann, R., Van Den Berg, J. A., Giubertoni, D., Hoenicke, P., Bersani, M., Leibold, A., Meirer, F., Mueller, M., Pepponi, G., Otto, M., Petrik, P., Reading, M., Pfitzner, L. & Ryssel, H., jan. 1 2009, Ultra Clean Processing of Semiconductor Surfaces IX: UCPSS 2008. Trans Tech Publications Ltd, p. 97-100 4 p. (Solid State Phenomena; vol. 145-146).

Research output: Conference contribution

13 Citations (Scopus)
2 Citations (Scopus)

Composite polymeric-inorganic waveguide fabricated by injection molding for biosensing applications

Dortu, F., Bernier, D., Cestier, I., Vandormael, D., Emmerechts, C., Fissi, L. E., Francis, L., Nittler, L., Houssiau, L., Fodor, B., Agocs, E., Petrik, P. & Fried, M., 2014, ICTON 2014 - 16th International Conference on Transparent Optical Networks. IEEE Computer Society, 6876325. (International Conference on Transparent Optical Networks).

Research output: Conference contribution

1 Citation (Scopus)

Composition and thickness of RF sputtered amorphous silicon alloy films

Lohner, T., Serényi, M., Basa, D. K., Khánh, N. Q., Nemcsics, Á., Petrik, P. & Turmezei, P., dec. 1 2008, In : Acta Polytechnica Hungarica. 5, 2, p. 23-30 8 p.

Research output: Article

2 Citations (Scopus)
2 Citations (Scopus)

Depth distribution of disorder and cavities in high dose helium implanted silicon characterized by spectroscopic ellipsometry

Petrik, P., Cayrel, F., Fried, M., Polgár, O., Lohner, T., Vincent, L., Alquier, D. & Gyulai, J., máj. 1 2004, In : Thin Solid Films. 455-456, p. 344-348 5 p.

Research output: Conference article

4 Citations (Scopus)

Design, Ion beam fabrication and test of integrated optical elements

Bányász, I., Pelli, S., Nunzi-Conti, G., Righini, G. C., Berneschi, S., Szilágyi, E., Németh, A., Fried, M., Petrik, P., Agócs, E., Kalas, B., Zolnai, Z., Khanh, N. Q., Rajta, I., Nagy, G. U. L., Havranek, V., Vosecek, V., Veres, M. & Himics, L., 2017, PHOTOPTICS 2018 - Proceedings of the 6th International Conference on Photonics, Optics and Laser Technology. Raposo, M. & Ribeiro, P. A. (eds.). SciTePress, p. 279-285 7 p. (PHOTOPTICS 2018 - Proceedings of the 6th International Conference on Photonics, Optics and Laser Technology; vol. 2017-January).

Research output: Conference contribution

Open Access

Design and process development of a photonic crystal polymer biosensor for point of care diagnostics

Dortu, F., Egger, H., Kolari, K., Haatainen, T., Furjes, P., Fekete, Z., Bernier, D., Sharp, G., Lahiri, B., Kurunczi, S., Sanchez, J. C., Turck, N., Petrik, P., Patko, D., Horvath, R., Eidenb, S., Aalto, T., Watts, S., Johnson, N. P., De La Ruef, R. M. & 1 others, Giannonea, D., 2011, Clinical and Biomedical Spectroscopy and Imaging II. 80870D. (Progress in Biomedical Optics and Imaging - Proceedings of SPIE; vol. 8087).

Research output: Conference contribution

8 Citations (Scopus)
4 Citations (Scopus)

Determination of the complex dielectric function of ion-implanted amorphous germanium by spectroscopic ellipsometry

Lohner, T., Szilágyi, E., Zolnai, Z., Németh, A., Fogarassy, Z., Illés, L., Kótai, E., Petrik, P. & Fried, M., máj. 1 2020, In : Coatings. 10, 5, 480.

Research output: Article

Open Access
5 Citations (Scopus)

Dextran-based hydrogel layers for biosensors

Saftics, A., Türk, B., Sulyok, A., Nagy, N., Agócs, E., Kalas, B., Petrik, P., Fried, M., Khánh, N. Q., Prósz, A., Kamarás, K., Szekacs, I., Horvath, R. & Kurunczi, S., jan. 1 2020, Nanobiomaterial Engineering: Concepts and Their Applications in Biomedicine and Diagnostics. Springer Singapore, p. 139-164 26 p.

Research output: Chapter

Dielectric function and defect structure of CdTe implanted by 350-keV Bi ions

Petrik, P., Fried, M., Zolnai, Z., Khánh, N. Q., Li, J., Collins, R. W. & Lohner, T., dec. 1 2009, Materials Research Society Symposium Proceedings - Photovoltaic Materials and Manufacturing Issues. p. 81-87 7 p. (Materials Research Society Symposium Proceedings; vol. 1123).

Research output: Conference contribution

3 Citations (Scopus)

Dielectric function of disorder in high-fluence helium-implanted silicon

Petrik, P., Fried, M., Lohner, T., Khánh, N. Q., Basa, P., Polgár, O., Major, C., Gyulai, J., Cayrel, F. & Alquier, D., dec. 1 2006, In : Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 253, 1-2, p. 192-195 4 p.

Research output: Article

7 Citations (Scopus)

Doping silica beyond limits with laser plasma for active photonic materials

Chandrappan, J., Murray, M., Petrik, P., Agocs, E., Zolnai, Z., Tempez, A., Legendre, S., Steenson, D. P., Jha, A. & Jose, G., 2015, In : Optical Materials Express. 5, 12, p. 2849-2861 13 p.

Research output: Article

11 Citations (Scopus)

Dose-dependence of ion implantation-caused damage in silicon measured by ellipsometry and backscattering spectrometry

Fried, M., Petrik, P., Lohner, T., Khánh, N. Q., Polgár, O. & Gyulai, J., máj. 1 2004, In : Thin Solid Films. 455-456, p. 404-409 6 p.

Research output: Conference article

13 Citations (Scopus)
9 Citations (Scopus)

Effect of high-temperature annealing on evaporated silicon oxide films: A spectroscopic ellipsometry study

Szekeres, A., Vlaikova, E., Lohner, T., Petrik, P., Cziraki, A., Zlobin, S. & Shepeliavyi, P., dec. 1 2009, ECS Transactions - Analytical Techniques for Semiconductor Materials and Process Characterization 6, ALTECH 2009. 3 ed. p. 379-384 6 p. (ECS Transactions; vol. 25, no. 3).

Research output: Conference contribution

Effect of ion current density on damage in Al ion implanted SiC

Battistig, G., López, J. G., Morilla, Y., Khánh, N. Q., Lohner, T., Petrik, P. & Ramos, A. R., jún. 1 2004, In : Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 219-220, 1-4, p. 652-655 4 p.

Research output: Conference article

4 Citations (Scopus)

Electrical and optical properties of Si-rich SiNx layers: Effect of annealing

Szöllosi, P., Basa, P., Dücso, C., Máté, B., Ádám, M., Lohner, T., Petrik, P., Pécz, B., Tóth, L., Dobos, L., Dózsa, L. & Horváth, Z. J., febr. 1 2006, In : Current Applied Physics. 6, 2, p. 179-181 3 p.

Research output: Conference article

2 Citations (Scopus)

Electrical and structural properties of ultrathin SiON films on Si prepared by plasma nitridation

Hourdakis, E., Nassiopoulou, A. G., Parisini, A., Reading, M. A., Van Den Berg, J. A., Sygellou, L., Ladas, S., Petrik, P., Nutsch, A., Wolf, M. & Roeder, G., jan. 1 2011, In : Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 29, 2, 022201.

Research output: Article

2 Citations (Scopus)

Electrochemical Sensors for Detection of Different Ionic Species (Nitrites/Nitrates and Heavy Metals) in Natural Water Sources

Gartner, M., Lete, C., Chelu, M., Stroescu, H., Zaharescu, M., Moldovan, C., Brasoveanu, C., Gheorghe, M., Gheorghe, S., Duta, A., Labadi, Z., Kalas, B., Saftics, A., Fried, M., Petrik, P., Toth, E., Jankovics, H. & Vonderviszt, F., nov. 16 2018, 2018 41st International Semiconductor Conference, CAS 2018 - Proceedings. Dinescu, M. A., Dobrescu, D., Muller, A., Cristea, D., Dragoman, M., Muller, R., Ciurea, M. L., Neculoiu, D. & Brezeanu, G. (eds.). Institute of Electrical and Electronics Engineers Inc., Vol. 2018-October. p. 329-332 4 p. 8539739

Research output: Conference contribution