• 1330 Citations
  • 19 h-Index
19962020

Research output per year

If you made any changes in Pure these will be visible here soon.

Research Output

1996

Characterization of different porous silicon structures by spectroscopic ellipsometry

Fried, M., Lohner, T., Polgár, O., Petrik, P., Vázsonyi, É., Bársony, I., Piel, J. P. & Stehle, J. L., ápr. 15 1996, In : Thin Solid Films. 276, 1-2, p. 223-227 5 p.

Research output: Article

50 Citations (Scopus)
1997
11 Citations (Scopus)
2 Citations (Scopus)
1998
38 Citations (Scopus)
80 Citations (Scopus)
7 Citations (Scopus)
4 Citations (Scopus)
1 Citation (Scopus)

Surface disorder production during plasma immersion implantation

Lohner, T., Khánh, N. Q., Petrik, P., Biró, L. P., Fried, M., Pintér, I., Lehnert, W., Frey, L., Ryssel, H., Wentink, D. J. & Gyulai, J., febr. 13 1998, In : Thin Solid Films. 313-314, p. 254-258 5 p.

Research output: Article

1 Citation (Scopus)
1999
20 Citations (Scopus)
14 Citations (Scopus)
2000

Advanced optical model for the ellipsometric study of ion implantation-caused damage depth profiles in single-crystalline silicon

Petrik, P., Polgár, O., Fried, M., Lohner, T., Khánh, N. Q. & Gyulai, J., dec. 1 2000, 2000 International Conference on Ion Implantation Technology, IIT 2000 - Proceedings. p. 151-154 4 p. 924112. (Proceedings of the International Conference on Ion Implantation Technology).

Research output: Conference contribution

1 Citation (Scopus)
23 Citations (Scopus)

Ellipsometric study of polycrystalline silicon films prepared by low-pressure chemical vapor deposition

Petrik, P., Lohner, T., Fried, M., Biró, L. P., Khánh, N. Q., Gyulai, J., Lehnert, W., Schneider, C. & Ryssel, H., febr. 2000, In : Journal of Applied Physics. 87, 4, p. 1734-1742 9 p.

Research output: Article

54 Citations (Scopus)

In situ spectroscopic ellipsometry for the characterization of polysilicon formation inside a vertical furnace

Petrik, P., Lehnert, W., Schneider, C., Fried, M., Lohner, T., Gyulai, J. & Ryssel, H., márc. 27 2000, In : Thin Solid Films. 364, 1, p. 150-155 6 p.

Research output: Conference article

4 Citations (Scopus)
2001

In situ measurement of the crystallization of amorphous silicon in a vertical furnace using spectroscopic ellipsometry

Petrik, P., Lehnert, W., Schneider, C., Lohner, T., Fried, M., Gyulai, J. & Ryssel, H., febr. 15 2001, In : Thin Solid Films. 383, 1-2, p. 235-240 6 p.

Research output: Article

5 Citations (Scopus)

In situ spectroscopic ellipsometry in vertical furnace: Monitoring and control of high-temperature processes

Petrik, P. & Schneider, C., máj. 14 2001, In : Vacuum. 61, 2-4, p. 427-434 8 p.

Research output: Conference article

6 Citations (Scopus)

Porous silicon formation by stain etching

Vázsonyi, É., Szilágyi, E., Petrik, P., Horváth, Z. E., Lohner, T., Fried, M. & Jalsovszky, G., jún. 1 2001, In : Thin Solid Films. 388, 1-2, p. 295-302 8 p.

Research output: Article

73 Citations (Scopus)
2002
9 Citations (Scopus)

Ellipsometric characterization of shallow damage profiles created by Xe-implantation into silicon

Petrik, P., Polgár, O., Lohner, T., Fried, M., Khánh, N. Q., Gyulai, J. & Ramadan, E., 2002, Proceedings of the International Conference on Ion Implantation Technology. Institute of Electrical and Electronics Engineers Inc., Vol. 22-27-September-2002. p. 601-604 4 p. 1258077

Research output: Conference contribution

Ellipsometric study of ion-implantation damage in single-crystal silicon - An advanced optical model

Petrik, P., Polgár, O., Lohner, T., Fried, M., Khánh, N. Q. & Gyulai, J., jan. 1 2002, In : Solid State Phenomena. 82-84, p. 765-770 6 p.

Research output: Conference article

1 Citation (Scopus)
10 Citations (Scopus)

Non-destructive characterization of strontium bismuth tantalate films

Petrik, P., Khánh, N. Q., Horváth, Z. E., Zolnai, Z., Bársony, I., Lohner, T., Fried, M., Gyulai, J., Schmidt, C., Schneider, C. & Ryssel, H., ápr. 1 2002, In : Materials Science in Semiconductor Processing. 5, 2-3, p. 141-145 5 p.

Research output: Article

1 Citation (Scopus)
2003
1 Citation (Scopus)
5 Citations (Scopus)

Ellipsometric characterization of damage profiles using an advanced optical model

Petrik, P., Polgár, O., Fried, M., Lohner, T., Khánh, N. Q. & Gyulai, J., febr. 15 2003, In : Journal of Applied Physics. 93, 4, p. 1987-1990 4 p.

Research output: Article

27 Citations (Scopus)
2004

Depth distribution of disorder and cavities in high dose helium implanted silicon characterized by spectroscopic ellipsometry

Petrik, P., Cayrel, F., Fried, M., Polgár, O., Lohner, T., Vincent, L., Alquier, D. & Gyulai, J., máj. 1 2004, In : Thin Solid Films. 455-456, p. 344-348 5 p.

Research output: Conference article

4 Citations (Scopus)

Dose-dependence of ion implantation-caused damage in silicon measured by ellipsometry and backscattering spectrometry

Fried, M., Petrik, P., Lohner, T., Khánh, N. Q., Polgár, O. & Gyulai, J., máj. 1 2004, In : Thin Solid Films. 455-456, p. 404-409 6 p.

Research output: Conference article

12 Citations (Scopus)

Effect of ion current density on damage in Al ion implanted SiC

Battistig, G., López, J. G., Morilla, Y., Khánh, N. Q., Lohner, T., Petrik, P. & Ramos, A. R., jún. 1 2004, In : Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 219-220, 1-4, p. 652-655 4 p.

Research output: Conference article

4 Citations (Scopus)

Ion implantation-caused damage in SiC measured by spectroscopic ellipsometry

Petrik, P., Shaaban, E. R., Lohner, T., Battistig, G., Fried, M., Lopez, J. G., Morilla, Y., Polgár, O. & Gyulai, J., máj. 1 2004, In : Thin Solid Films. 455-456, p. 239-243 5 p.

Research output: Conference article

3 Citations (Scopus)

Optical characterization of ferroelectric strontium-bismuth-tantalate (SBT) thin films

Schmidt, C., Petrik, P., Schneider, C., Fried, M., Lohner, T., Bársony, I., Gyulai, J. & Ryssel, H., máj. 1 2004, In : Thin Solid Films. 455-456, p. 495-499 5 p.

Research output: Conference article

6 Citations (Scopus)
2005

Ellipsometric study of SiNx/nc-Si/SiNx multilayers

Basa, P. & Petrik, P., dec. 1 2005, Proceedings - 2005 International Semiconductor Conference, CAS 2005. p. 417-420 4 p. 1558815. (Proceedings of the International Semiconductor Conference, CAS; vol. 2).

Research output: Conference contribution

7 Citations (Scopus)
5 Citations (Scopus)
2006
10 Citations (Scopus)

Dielectric function of disorder in high-fluence helium-implanted silicon

Petrik, P., Fried, M., Lohner, T., Khánh, N. Q., Basa, P., Polgár, O., Major, C., Gyulai, J., Cayrel, F. & Alquier, D., dec. 1 2006, In : Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 253, 1-2, p. 192-195 4 p.

Research output: Article

7 Citations (Scopus)

Electrical and optical properties of Si-rich SiNx layers: Effect of annealing

Szöllosi, P., Basa, P., Dücso, C., Máté, B., Ádám, M., Lohner, T., Petrik, P., Pécz, B., Tóth, L., Dobos, L., Dózsa, L. & Horváth, Z. J., febr. 1 2006, In : Current Applied Physics. 6, 2, p. 179-181 3 p.

Research output: Conference article

2 Citations (Scopus)

Ellipsometric characterization of nanocrystals in porous silicon

Petrik, P., Fried, M., Vázsonyi, É., Lohner, T., Horváth, E., Polgár, O., Basa, P., Bársony, I. & Gyulai, J., okt. 31 2006, In : Applied Surface Science. 253, 1 SPEC. ISS., p. 200-203 4 p.

Research output: Article

15 Citations (Scopus)

Evaluation strategies for multi-layer, multi-material ellipsometric measurements

Polgár, O., Petrik, P., Lohner, T. & Fried, M., okt. 31 2006, In : Applied Surface Science. 253, 1 SPEC. ISS., p. 57-64 8 p.

Research output: Article

15 Citations (Scopus)

Optical and X-ray characterization of ferroelectric strontium-bismuth-tantalate (SBT) thin films

Fried, M., Petrik, P., Horváth, Z. E., Lohner, T., Schmidt, C., Schneider, C. & Ryssel, H., okt. 31 2006, In : Applied Surface Science. 253, 1 SPEC. ISS., p. 349-353 5 p.

Research output: Article

3 Citations (Scopus)
4 Citations (Scopus)

Spectroscopic ellipsometric study of LPCVD-deposited Si nanocrystals in SiNx and Si3N4

Basa, P., Petrik, P. & Fried, M., dec. 1 2006, Conference Proceedings - The 6th International Conference on Advanced Semiconductor Devices and Microsystems, ASDAM'06. p. 87-89 3 p. 4133084. (Conference Proceedings - The 6th International Conference on Advanced Semiconductor Devices and Microsystems, ASDAM'06).

Research output: Conference contribution

Studies on the RF sputtered amorphous SiGe thin films

Serényi, M., Lohner, T., Zolnai, Z., Petrik, P., Nemcsics, Á., Khánh, N. Q. & Turmezei, P., jan. 1 2006, In : Inorganic Materials. 42, 1, p. 3-6 4 p.

Research output: Article

2007
19 Citations (Scopus)
21 Citations (Scopus)
19 Citations (Scopus)
5 Citations (Scopus)
2008

Characterization of Ru and RuO2 thin films prepared by pulsed metal organic chemical vapor deposition

Roeder, G., Manke, C., Baumann, P. K., Petersen, S., Yanev, V., Gschwandtner, A., Ruhl, G., Petrik, P., Schellenberger, M., Pfitzner, L. & Ryssel, H., dec. 1 2008, In : Physica Status Solidi (C) Current Topics in Solid State Physics. 5, 5, p. 1231-1234 4 p.

Research output: Conference article

2 Citations (Scopus)
23 Citations (Scopus)
2 Citations (Scopus)