• 1801 Citations
  • 21 h-Index
1971 …2019
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Research Output 1971 2019

  • 1801 Citations
  • 21 h-Index
  • 140 Article
  • 5 Chapter
  • 2 Conference contribution
2019

Cross sectional complex structure analysis is a key issue of thin film research: A case study on the preferential orientation crossover in TiN thin films

Barna, P. B., Biro, D., Hasaneen, M. F., Székely, L., Menyhárd, M., Sulyok, A., Horváth, Z. E., Pekker, P., Dódony, I. & Radnóczi, G., jan. 1 2019, (Accepted/In press) In : Thin Solid Films. 137478.

Research output: Article

crossovers
Thin films
thin films
Oxygen
Experiments

Novel method for the production of SiC micro and nanopatterns

Racz, A. S., Zambo, D., Dobrik, G., Lukacs, I., Zolnai, Z., Nemeth, A., Panjan, P., Deák, A., Battistig, G. & Menyhárd, M., aug. 25 2019, In : Surface and Coatings Technology. 372, p. 427-433 7 p.

Research output: Article

Ion beams
ion beams
Nanostructures
Multilayers
Noble Gases
2018
3 Citations (Scopus)
Oxides
Metals
Electrons
Temperature
Silicon
2 Citations (Scopus)
Iridium
Excitation energy
Photoexcitation
Electron energy loss spectroscopy
Energy dissipation
2017
2 Citations (Scopus)
Noble Gases
Composite coatings
Inert gases
Silicon carbide
Corrosion resistance
2016
3 Citations (Scopus)
Ballistics
ballistics
Ion beams
laminates
Multilayers
3 Citations (Scopus)

Wafer-scale SiC rich nano-coating layer by Ar+ and Xe+ ion mixing

Battistig, G., Gurbán, S., Sáfrán, G., Sulyok, A., Németh, A., Panjan, P., Zolnai, Z. & Menyhárd, M., szept. 25 2016, In : Surface and Coatings Technology. 302, p. 320-326 7 p.

Research output: Article

Ion bombardment
ion irradiation
wafers
Ions
coatings
2015
4 Citations (Scopus)

The chemical resistance of nano-sized SiC rich composite coating

Gurbán, S., Kotis, L., Pongracz, A., Sulyok, A., Tóth, A., Vázsonyi, E. & Menyhárd, M., jan. 15 2015, In : Surface and Coatings Technology. 261, p. 195-200 6 p.

Research output: Article

Chemical resistance
Composite coatings
Etching
coatings
composite materials
2014
3 Citations (Scopus)
Graphite
Depth profiling
Auger electron spectroscopy
Buffer layers
Graphene
8 Citations (Scopus)
Carbon
Crystallites
Thin films
Nanohardness
Mechanical properties
9 Citations (Scopus)

Texture change of TiN films due to anisotropic incorporation of oxygen

Biro, D., Hasaneen, M. F., Székely, L., Menyhárd, M., Gurbán, S., Pekker, P., Dódony, I. & Barna, P., máj. 2014, In : Vacuum. 103, p. 78-86 9 p.

Research output: Article

textures
Textures
Oxygen
oxygen
Crystals
2013
3 Citations (Scopus)
Depth profiling
Electron energy loss spectroscopy
energy dissipation
electron energy
Nanoparticles
2 Citations (Scopus)
electron flux density
laminates
Electrons
electrons
simulation
18 Citations (Scopus)

Structural, mechanical and biological comparison of TiC and TiCN nanocomposites films

Balázsi, K., Lukács, I. E., Gurbán, S., Menyhárd, M., Bacáková, L., Vandrovcová, M. & Balázsi, C., okt. 2013, In : Journal of the European Ceramic Society. 33, 12, p. 2217-2221 5 p.

Research output: Article

Nanocomposite films
Argon
Carbon
Nitrogen
Vacuum deposition
2012
12 Citations (Scopus)

Growth of amorphous SiC film on Si by means of ion beam induced mixing

Barna, A., Gurban, S., Kotis, L., Lábár, J., Sulyok, A., Tóth, A., Menyhárd, M., Kovac, J. & Panjan, P., dec. 15 2012, In : Applied Surface Science. 263, p. 367-372 6 p.

Research output: Article

Amorphous films
Ion beams
Ions
Focused ion beams
Ion bombardment
2 Citations (Scopus)

In-depth distribution of ion beam damage in SiC

Sulyok, A., Menyhárd, M. & Malherbe, J. B., jan. 27 2012, In : Vacuum. 86, 6, p. 761-764 4 p.

Research output: Article

Ion beams
Sputtering
ion beams
damage
Auger electron spectroscopy
16 Citations (Scopus)

Passivation of GaAs(001) surface by the growth of high quality c-GaN ultra-thin film using low power glow discharge nitrogen plasma source

Monier, G., Bideux, L., Robert-Goumet, C., Gruzza, B., Petit, M., Lábár, J. & Menyhárd, M., júl. 2012, In : Surface Science. 606, 13-14, p. 1093-1099 7 p.

Research output: Article

Nitrogen plasma
nitrogen plasma
Plasma sources
Ultrathin films
Glow discharges
5 Citations (Scopus)

Thin TaC layer produced by ion mixing

Barna, A., Kotis, L., Pécz, B., Sulyok, A., Sáfrán, G., Tóth, A., Menyhárd, M., Kovács, A. & Savenko, A., máj. 25 2012, In : Surface and Coatings Technology. 206, 19-20, p. 3917-3922 6 p.

Research output: Article

Ions
ions
Carbon
Stoichiometry
fluence
2011
3 Citations (Scopus)
Backscattering
backscattering
Electrons
excitation
electrons
5 Citations (Scopus)
Projectiles
Ion bombardment
Ion beams
Vacancies
Carbon
2010
3 Citations (Scopus)

Simulation and measurement of AES depth profiles; a case study of the C/Ta/C/Si system

Zommer, L., Jablonski, A., Kotis, L., Sáfrán, G. & Menyhárd, M., ápr. 15 2010, In : Surface Science. 604, 7-8, p. 633-640 8 p.

Research output: Article

Ion bombardment
Depth profiling
Backscattering
profiles
Multilayers
2009
8 Citations (Scopus)
Tantalum
Depth profiling
Auger electron spectroscopy
tantalum
Auger spectroscopy
5 Citations (Scopus)
Depth profiling
Ellipsometry
Auger electron spectroscopy
Ion beams
ellipsometry
6 Citations (Scopus)
ion beams
irradiation
ion irradiation
Auger spectroscopy
electron spectroscopy
5 Citations (Scopus)

The inelastic mean free path of electrons. Past and present research

Gergely, G., Gurban, S., Menyhárd, M., Jablonski, A., Zommer, L. & Goto, K., aug. 25 2009, In : Vacuum. 84, 1, p. 134-136 3 p.

Research output: Article

Electron spectroscopy
mean free path
electron spectroscopy
Electrons
electrons
2008
10 Citations (Scopus)
asymmetry
Ions
bombardment
ions
Depth profiling
1 Citation (Scopus)

Ion mixing at 20 keV: A comparison of the effects of Ga+, Ar+ and CF4+ ion irradiation

Barna, A., Gurban, S., Kotis, L., Tóth, A. & Menyhárd, M., dec. 2008, In : Ultramicroscopy. 109, 1, p. 129-132 4 p.

Research output: Article

Ion bombardment
ion irradiation
Ions
Irradiation
irradiation
6 Citations (Scopus)

Monte Carlo calculation of backscattering factor for Ni-C multilayer system

Zommer, L., Jablonski, A., Kotis, L. & Menyhárd, M., aug. 7 2008, In : Journal of Physics D: Applied Physics. 41, 15, 155312.

Research output: Article

Backscattering
backscattering
Multilayers
Auger electron spectroscopy
Depth profiling
1 Citation (Scopus)
mean free path
histories
electrons
electron spectroscopy
backscattering
2007
15 Citations (Scopus)

Asymmetric transient enhanced intermixing in Pt/Ti

Süle, P., Menyhárd, M., Kótis, L., Lábár, J. & Egelhoff, W. F., 2007, In : Journal of Applied Physics. 101, 4, 043502.

Research output: Article

sputtering
asymmetry
molecular dynamics
ions
simulation
8 Citations (Scopus)

Determination of relative sputtering yield of Cr/Si

Kotis, L., Menyhárd, M., Tóth, L., Zalar, A. & Panjan, P., okt. 29 2007, In : Vacuum. 82, 2 SPEC. ISS., p. 178-181 4 p.

Research output: Article

Sputtering
sputtering
Depth profiling
Silicon
Projectiles
4 Citations (Scopus)
polyacetylene
mean free path
electron spectroscopy
evaluation
electrons
6 Citations (Scopus)
bombardment
Ion bombardment
Depth profiling
Molecular dynamics
ions
3 Citations (Scopus)
Depth profiling
Auger electron spectroscopy
Auger spectroscopy
electron spectroscopy
Molecular dynamics
12 Citations (Scopus)

Ion beam mixing by focused ion beam

Barna, A., Kotis, L., Lábár, J., Osváth, Z., Tóth, A., Menyhárd, M., Zalar, A. & Panjan, P., 2007, In : Journal of Applied Physics. 102, 5, 053513.

Research output: Article

fluence
ion beams
irradiation
ion irradiation
laminates
9 Citations (Scopus)

Stability of ZnO{0 0 0 1} against low energy ion bombardment

Sulyok, A., Menyhárd, M. & Malherbe, J. B., ápr. 15 2007, In : Surface Science. 601, 8, p. 1857-1861 5 p.

Research output: Article

Ion bombardment
bombardment
Ions
ions
Argon
2006
1 Citation (Scopus)
Electron spectroscopy
Conducting polymers
conducting polymers
electron spectroscopy
mean free path
1 Citation (Scopus)

Electron stimulated thorium adatom enrichment on the surface of thoriated tungsten below 2300 K

Böröczki, Á., Gaál, I., Gurbán, S., Menyhárd, M., Horváth, E., Tóth, A., Petrás, L. & Balázs, L., júl. 2006, In : International Journal of Refractory Metals and Hard Materials. 24, 4, p. 343-349 7 p.

Research output: Article

Thoria
Thorium
Tungsten
Adatoms
Surface structure
11 Citations (Scopus)
mean free path
Oxide films
oxide films
Electrons
excitation
5 Citations (Scopus)

Influence of layer microstructure on the double nucleation process in Cu/Mg multilayers

Gonzalez-Silveira, M., Rodriguez-Viejo, J., Garcia, G., Pi, F., Ager, F. J., Lábár, J., Barna, A., Menyhárd, M. & Kótis, L., 2006, In : Journal of Applied Physics. 100, 11, 113522.

Research output: Article

nucleation
microstructure
transmission electron microscopy
cross sections
coalescing
6 Citations (Scopus)

Surface excitation correction of the inelastic mean free path in selected conducting polymers

Gergely, G., Menyhárd, M., Orosz, G. T., Lesiak, B., Kosinski, A., Jablonski, A., Nowakowski, R., Tóth, J. & Varga, D., máj. 15 2006, In : Applied Surface Science. 252, 14, p. 4982-4989 8 p.

Research output: Article

Conducting polymers
conducting polymers
mean free path
excitation
Polymers
2005
4 Citations (Scopus)
Electron reflection
Ion bombardment
bombardment
Energy dissipation
energy dissipation

Inelastic mean free path data for Si corrected for surface excitation

Orosz, G. T., Gergely, G., Gurbán, S., Menyhárd, M. & Jablonski, A., dec. 2005, In : Microscopy and Microanalysis. 11, 6, p. 581-585 5 p.

Research output: Article

mean free path
Electron spectroscopy
electron spectroscopy
Electrons
excitation
7 Citations (Scopus)

Ion bombardment induced interface broadening in Co/Cu system as a function of layer thickness

Barna, A., Menyhárd, M., Zalar, A. & Panjan, P., ápr. 15 2005, In : Applied Surface Science. 242, 3-4, p. 375-379 5 p.

Research output: Article

Ion bombardment
Sputtering
bombardment
Ions
Depth profiling
15 Citations (Scopus)
Ballistics
ballistics
Ion beams
Metals
ion beams
13 Citations (Scopus)

Unexpectedly high sputtering yield of carbon at grazing angle of incidence ion bombardment

Barna, A., Menyhárd, M., Kotis, L., Kovacs, G. J., Radnóczi, G., Zalar, A. & Panjan, P., júl. 15 2005, In : Journal of Applied Physics. 98, 2, 024901.

Research output: Article

grazing
bombardment
incidence
sputtering
carbon
2004
9 Citations (Scopus)
Metals
damage
metals
Ion bombardment
ion irradiation

Dissociation of thorium oxide on the surface of free surface tungsten

Böröczki, A., Gaál, Gurbán, S., Menyhárd, M., Petrás, L. & Balázs, L., 2004, Institute of Physics Conference Series. Zissis, G. (ed.). Vol. 182. p. 591-592 2 p.

Research output: Conference contribution

thorium oxides
tungsten
dissociation
thorium
Auger spectroscopy
24 Citations (Scopus)
Electron spectroscopy
electron spectroscopy
excitation
Spectrometers
Metals
22 Citations (Scopus)

Hydrogen and surface excitation in electron spectra of polyethylene

Orosz, G. T., Gergely, G., Menyhárd, M., Tóth, J., Varga, D., Lesiak, B. & Jablonski, A., szept. 20 2004, In : Surface Science. 566-568, 1-3 PART 1, p. 544-548 5 p.

Research output: Article

Polyethylene
Electron spectroscopy
electron spectroscopy
Polyethylenes
polyethylenes