• 585 Citations
  • 13 h-Index
19952012
If you made any changes in Pure these will be visible here soon.

Research Output 1995 2012

  • 585 Citations
  • 13 h-Index
  • 34 Article
  • 9 Conference contribution
Filter
Conference contribution
2012

Electrostatic force detection during anodic wafer bonding

Kárpáti, T., Pap, A., Ádám, M., Ferencz, J., Fürjes, P., Battistig, G. & Bársony, I., 2012, Proceedings of IEEE Sensors. 6411331

Research output: Conference contribution

Wafer bonding
Electrostatic force
Silicon
Membrane structures
Bias voltage
1 Citation (Scopus)

Flexible packaging for tyre integrated shear force sensor

Kulinyi, S., Vegvari, R., Pongracz, A., Nagy, A., Kárpáti, T., Ádám, M., Battistig, G. & Bársony, I., 2012, Proceedings of IEEE Sensors. 6411326

Research output: Conference contribution

Tires
Packaging
Sensors
MEMS
Rubber
2008
2 Citations (Scopus)

Integrated tactile system for dynamic 3D contact force mapping

Vásárhelyi, G., Ádám, M., Dücső, C., Bársony, I. & Kis, A., 2008, Proceedings of IEEE Sensors. p. 791-794 4 p. 4716560

Research output: Conference contribution

Sensor arrays
Data acquisition
Robotics
Textures
2006

Carbon nanotubes - Towards artificial nose implementation

Koos, A. A., Kertész, K., Ádám, M., Dücső, C., Horváth, Z., Bíró, L., Bársony, I., Gyulai, J., Kónya, Z. & Kiricsi, I., 2006, Proceedings of IEEE Sensors. p. 1395-1399 5 p. 4178887

Research output: Conference contribution

Carbon nanotubes
Nanotubes
Gases
Vapors
Modulation
2005
3 Citations (Scopus)

Noise in piezoresistive Si pressure sensors

Szentpáli, B., Ádám, M. & Mohácsy, T., 2005, Proceedings of SPIE - The International Society for Optical Engineering. Bergou, J. A., Smulko, J. M., Dykman, M. I. & Wang, L. (eds.). Vol. 5846. p. 169-179 11 p. 23

Research output: Conference contribution

Pressure sensors
noise spectra
silicones
pressure sensors
Silicones
2004
8 Citations (Scopus)

Three dimensional single crystalline force sensor by porous Si micromachining

Ádám, M., Vázsonyi, E., Bársony, I., Vésárhelyi, G. & Dücső, C., 2004, Proceedings of IEEE Sensors. Rocha, D., Sarro, P. M. & Vellekoop, M. J. (eds.). Vol. 1. p. 501-504 4 p. M4P-P.1

Research output: Conference contribution

Micromachining
Crystalline materials
Membranes
Sensors
Surface micromachining
2003
2 Citations (Scopus)

Al/a-SiGe: H/c-Si m-i-p diodes - A new type of heterodevices

Horváth, Z., Serényi, M., Ádám, M., Szabó, I., Badalján, E. & Rakovics, V., 2003, Physica Status Solidi C: Conferences. 3 ed. p. 1066-1069 4 p.

Research output: Conference contribution

Diodes
capacitance-voltage characteristics
diodes
Electric potential
Capacitance
2001
7 Citations (Scopus)

Porous silicon as multifunctional material in MEMS

Mescheder, U. M., Kovacs, A., Kronast, W., Bársony, I., Ádám, M. & Dücső, C., 2001, Proceedings of the IEEE Conference on Nanotechnology. IEEE Computer Society, Vol. 2001-January. p. 483-488 6 p. 966471

Research output: Conference contribution

Porous silicon
porous silicon
microelectromechanical systems
MEMS
Surface micromachining
1999

Low pressure detection by depletion channel MOS transistors

Mohácsy, T., Ádám, M., Bársony, I. & Kulinyi, S., 1999, ESSDERC 1999 - Proceeding of the 29th European Solid-State Device Research Conference. IEEE Computer Society, Vol. 13-15 Sept. 1999. p. 328-331 4 p. 1505506

Research output: Conference contribution

MOSFET devices
Membranes
Pressure sensors