• 580 Citations
  • 13 h-Index
19952012
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Research Output 1995 2012

  • 580 Citations
  • 13 h-Index
  • 34 Article
  • 9 Conference contribution
2012

Electrostatic force detection during anodic wafer bonding

Kárpáti, T., Pap, A., Ádám, M., Ferencz, J., Fürjes, P., Battistig, G. & Bársony, I., 2012, Proceedings of IEEE Sensors. 6411331

Research output: Conference contribution

Wafer bonding
Electrostatic force
Silicon
Membrane structures
Bias voltage
1 Citation (Scopus)

Flexible packaging for tyre integrated shear force sensor

Kulinyi, S., Vegvari, R., Pongracz, A., Nagy, A., Kárpáti, T., Ádám, M., Battistig, G. & Bársony, I., 2012, Proceedings of IEEE Sensors. 6411326

Research output: Conference contribution

Tires
Packaging
Sensors
MEMS
Rubber
4 Citations (Scopus)

Sensitivity tuning of A 3-axial piezoresistive force sensor

Molnár, D., Pongrácz, A., Ádám, M., Hajnal, Z., Timárné, V. & Battistig, G., febr. 2012, In : Microelectronic Engineering. 90, p. 40-43 4 p.

Research output: Article

mesas
Tuning
tuning
Membranes
sensitivity
2009
12 Citations (Scopus)

Efficient catalytic combustion in integrated micropellistors

Bársony, I., Ádám, M., Fürjes, P., Lucklum, R., Hirschfelder, M., Kulinyi, S. & Dücső, C., 2009, In : Measurement Science and Technology. 20, 12, 124009.

Research output: Article

Combustion
Active Particles
Chemical Sensor
product development
sensors
2008
21 Citations (Scopus)

CMOS integrated tactile sensor array by porous Si bulk micromachining

Ádám, M., Mohácsy, T., Jónás, P., Dücső, C., Vázsonyi, E. & Bársony, I., márc. 10 2008, In : Sensors and Actuators: A. Physical. 142, 1, p. 192-195 4 p.

Research output: Article

Porous silicon
Micromachining
Sensor arrays
Silicon
micromachining
2 Citations (Scopus)

Integrated tactile system for dynamic 3D contact force mapping

Vásárhelyi, G., Ádám, M., Dücső, C., Bársony, I. & Kis, A., 2008, Proceedings of IEEE Sensors. p. 791-794 4 p. 4716560

Research output: Conference contribution

Sensor arrays
Data acquisition
Robotics
Textures
3 Citations (Scopus)

Makyoh-topography study of the swirl defect in Si wafers

Riesz, F., Pap, A., Ádám, M. & Lukács, I. E., szept. 30 2008, In : Thin Solid Films. 516, 22, p. 8087-8091 5 p.

Research output: Article

Topography
topography
Doping (additives)
wafers
Defects
2006

Carbon nanotubes - Towards artificial nose implementation

Koos, A. A., Kertész, K., Ádám, M., Dücső, C., Horváth, Z., Bíró, L., Bársony, I., Gyulai, J., Kónya, Z. & Kiricsi, I., 2006, Proceedings of IEEE Sensors. p. 1395-1399 5 p. 4178887

Research output: Conference contribution

Carbon nanotubes
Nanotubes
Gases
Vapors
Modulation
30 Citations (Scopus)

Characterization of an integrable single-crystalline 3-D tactile sensor

Vásárhelyi, G., Ádám, M., Vázsonyi, E., Vízváry, Z., Kis, A., Bársony, I. & Dücső, C., aug. 2006, In : IEEE Sensors Journal. 6, 4, p. 928-934 7 p., 1661573.

Research output: Article

Crystalline materials
sensors
Sensors
micromachining
membranes
32 Citations (Scopus)

Effects of the elastic cover on tactile sensor arrays

Vásárhelyi, G., Ádám, M., Vázsonyi, E., Bársony, I. & Dücső, C., nov. 8 2006, In : Sensors and Actuators: A. Physical. 132, 1 SPEC. ISS., p. 245-251 7 p.

Research output: Article

Sensor arrays
sensors
Sensors
hair
rubber
2 Citations (Scopus)
Electric properties
Optical properties
electrical properties
Annealing
optical properties
2005

Electrical behaviour of sputtered Al/SiGe/Si structures

Horváth, Z., Serényi, M., Ádám, M., Szabó, I., Rakovics, V., Turmezei, P., Zoinai, Z. & Khan, N. Q., 2005, In : Acta Physica Slovaca. 55, 3, p. 241-245 5 p.

Research output: Article

electric potential
electric contacts
capacitance
preparation
temperature
3 Citations (Scopus)

Noise in piezoresistive Si pressure sensors

Szentpáli, B., Ádám, M. & Mohácsy, T., 2005, Proceedings of SPIE - The International Society for Optical Engineering. Bergou, J. A., Smulko, J. M., Dykman, M. I. & Wang, L. (eds.). Vol. 5846. p. 169-179 11 p. 23

Research output: Conference contribution

Pressure sensors
noise spectra
silicones
pressure sensors
Silicones
6 Citations (Scopus)

Olfactory detection of methane, propane, butane and hexane using conventional transmitter norms

Kulinyi, S., Brandszájsz, D., Amine, H., Ádám, M., Fürjes, P., Bársony, I. & Dücső, C., nov. 11 2005, In : Sensors and Actuators, B: Chemical. 111-112, SUPPL., p. 286-292 7 p.

Research output: Article

Propane
Methane
Butane
Hexanes
butanes
5 Citations (Scopus)
Chemical sensors
equivalent circuits
Thermal effects
temperature effects
coatings
28 Citations (Scopus)

Three-dimensional force sensor by novel alkaline etching technique

Vázsonyi, E., Ádám, M., Dücs, C., Vízváry, Z., Tóth, A. & Bársony, I., szept. 23 2005, In : Sensors and Actuators: A. Physical. 123-124, p. 620-626 7 p.

Research output: Article

Etching
etching
membranes
Membranes
sensors
2004
9 Citations (Scopus)

Electrical behaviour of Al/SiGe/Si heterostructures: Effect of surface treatment and dislocations

Horváth, Z., Ádám, M., Szabó, I., Orlov, L. K., Potapov, A. V. & Tolomasov, V. A., júl. 15 2004, In : Applied Surface Science. 234, 1-4, p. 54-59 6 p.

Research output: Article

surface treatment
Dislocations (crystals)
Molecular beam epitaxy
Surface treatment
Heterojunctions
33 Citations (Scopus)

Thermal characterisation of micro-hotplates used in sensor structures

Fürjes, P., Dücs, C., Ádám, M., Zettner, J. & Bársony, I., márc. 2004, In : Superlattices and Microstructures. 35, 3-6, p. 455-464 10 p.

Research output: Article

Thermodynamic properties
Porous silicon
sensors
Sensors
thermodynamic properties
13 Citations (Scopus)

Thermal response of microfilament heaters in gas sensing

Bársony, I., Fürjes, P., Ádám, M., Dücső, C., Vízváry, Z., Zettner, J. & Stam, F., szept. 29 2004, In : Sensors and Actuators, B: Chemical. 103, 1-2, p. 442-447 6 p.

Research output: Article

Infrared imaging
porous silicon
equivalent circuits
heaters
isolation
8 Citations (Scopus)

Three dimensional single crystalline force sensor by porous Si micromachining

Ádám, M., Vázsonyi, E., Bársony, I., Vésárhelyi, G. & Dücső, C., 2004, Proceedings of IEEE Sensors. Rocha, D., Sarro, P. M. & Vellekoop, M. J. (eds.). Vol. 1. p. 501-504 4 p. M4P-P.1

Research output: Conference contribution

Micromachining
Crystalline materials
Membranes
Sensors
Surface micromachining
2003
2 Citations (Scopus)

Al/a-SiGe: H/c-Si m-i-p diodes - A new type of heterodevices

Horváth, Z., Serényi, M., Ádám, M., Szabó, I., Badalján, E. & Rakovics, V., 2003, Physica Status Solidi C: Conferences. 3 ed. p. 1066-1069 4 p.

Research output: Conference contribution

Diodes
capacitance-voltage characteristics
diodes
Electric potential
Capacitance
21 Citations (Scopus)
Microsensors
Hydrocarbons
Explosions
explosions
Thermal conductivity
65 Citations (Scopus)

Porous silicon-based humidity sensor with interdigital electrodes and internal heaters

Fürjes, P., Kovács, A., Dücső, C., Ádám, M., Müller, B. & Mescheder, U., okt. 15 2003, In : Sensors and Actuators, B: Chemical. 95, 1-3, p. 140-144 5 p.

Research output: Article

Humidity sensors
Porous silicon
porous silicon
heaters
humidity
2002
12 Citations (Scopus)

Electrical peculiarities in Al/Si/Ge/.../Ge/Si and Al/SiGe/Si structures

Horváth, Z., Jarrendähl, K., Ádám, M., Szabó, I., Van Tuyen, V. & Czigány, Z., máj. 8 2002, In : Applied Surface Science. 190, 1-4, p. 403-407 5 p.

Research output: Article

Multilayers
Electric potential
electric potential
Magnetron sputtering
electric contacts
23 Citations (Scopus)
Gases
Processing
gases
Chemical sensors
Contacts (fluid mechanics)
52 Citations (Scopus)

Modification of Al/Si interface and Schottky barrier height with chemical treatment

Horváth, Z., Ádám, M., Szabó, I., Serényi, M. & Van Tuyen, V., máj. 8 2002, In : Applied Surface Science. 190, 1-4, p. 441-444 4 p.

Research output: Article

Acetone
Fermi level
Oxides
Gases
Doping (additives)
11 Citations (Scopus)

Passivation of Al/Si interface by chemical treatment: Schottky barrier height and plasma etch induced defects

Horváth, Z., Ádám, M., Godio, P., Borionetti, G., Szabó, I., Gombia, E. & Van Tuyen, V., 2002, In : Solid State Phenomena. 82-84, p. 255-258 4 p.

Research output: Article

Fermi level
Passivation
Oxides
passivity
Gases
17 Citations (Scopus)

Thermal investigation of micro-filament heaters

Fürjes, P., Vizváry, Z., Ádám, M., Morrissey, A., Dücső, C. & Bársony, I., ápr. 30 2002, In : Sensors and Actuators: A. Physical. 99, 1-2, p. 98-103 6 p.

Research output: Article

heaters
filaments
Heat radiation
thermal simulation
Thermodynamic properties
2001
7 Citations (Scopus)

Porous silicon as multifunctional material in MEMS

Mescheder, U. M., Kovacs, A., Kronast, W., Bársony, I., Ádám, M. & Dücső, C., 2001, Proceedings of the IEEE Conference on Nanotechnology. IEEE Computer Society, Vol. 2001-January. p. 483-488 6 p. 966471

Research output: Conference contribution

Porous silicon
porous silicon
microelectromechanical systems
MEMS
Surface micromachining
8 Citations (Scopus)

Porous silicon light-emitting diodes - Mechanisms in the operation

Molnár, K., Mohácsy, T., Ádám, M. & Bársony, I., jún. 2001, In : Optical Materials. 17, 1-2, p. 111-116 6 p.

Research output: Article

Porous silicon
porous silicon
Light emitting diodes
light emitting diodes
Light emission
2000
metal oxide semiconductors
Transistors
depletion
transistors
Metals
5 Citations (Scopus)

Thermal modelling of a porous silicon-based pellistor-type catalytic flammable gas sensor with two supporting beams

Kolev, S. D., Ádám, M., Dücső, C., Bársony, I., Cobianu, C. & Van Den Berg, A., máj. 2000, In : Microelectronics Journal. 31, 5, p. 339-342 4 p.

Research output: Article

flammable gases
Porous silicon
Chemical sensors
porous silicon
sensors
1999
1 Citation (Scopus)

Effect of defect bands on the electrical characteristics of irradiated GaAs and Si

Horváth, Z., Gombia, E., Pal, D., Kovacsics, C., Capannese, G., Pintér, I., Ádám, M., Mosca, R., Van Tuyen, V. & Dózsa, L., 1999, In : Physica Status Solidi (A) Applied Research. 171, 1, p. 311-317 7 p.

Research output: Article

Semiconductor junctions
Defects
Deep level transient spectroscopy
Capacitance measurement
bombardment

Low pressure detection by depletion channel MOS transistors

Mohácsy, T., Ádám, M., Bársony, I. & Kulinyi, S., 1999, ESSDERC 1999 - Proceeding of the 29th European Solid-State Device Research Conference. IEEE Computer Society, Vol. 13-15 Sept. 1999. p. 328-331 4 p. 1505506

Research output: Conference contribution

MOSFET devices
Membranes
Pressure sensors
5 Citations (Scopus)
Silicon
Ion implantation
ion implantation
Masks
life (durability)
8 Citations (Scopus)

Plasma immersion ion implantation for shallow junctions in silicon

Pintér, I., Abdulhadi, A. H., Makaró, Z., Khanh, N. Q., Ádám, M., Bársony, I., Poortmans, J., Sivoththaman, S., Song, H. Z. & Adriaenssens, G. J., jan. 1999, In : Applied Surface Science. 138-139, 1-4, p. 224-227 4 p.

Research output: Article

Silicon
Ion implantation
submerging
ion implantation
Plasmas
1998
7 Citations (Scopus)

Anomalous temperature dependence of series resistance in Ag/Si and Al/Si Schottky junctions

Horváth, Z., Ádám, M., Pintér, I., Cvikl, B., Korošak, D., Mrdjen, T., Van Tuyen, V., Makaró, Z., Dücső, C. & Bársony, I., júl. 1 1998, In : Vacuum. 50, 3-4, p. 417-419 3 p.

Research output: Article

Ohmic contacts
submerging
electric contacts
implantation
Plasmas
23 Citations (Scopus)

Electrical characterisation of Al/n-Si/p-Si Schottky junctions prepared by plasma immersion implantation

Horváth, Z., Ádám, M., Dücső, C., Pintér, I., Van Tuyen, V., Bársony, I., Gombia, E., Mosca, R. & Makaró, Z. S., márc. 16 1998, In : Solid-State Electronics. 42, 2, p. 221-228 8 p.

Research output: Article

Capacitance measurement
Voltage measurement
Fermi level
Ion implantation
submerging
9 Citations (Scopus)

Mathematical modelling of a porous silicon-based pellistor-type catalytic flammable gas sensor

Kolev, S. D., Ádám, M., Bársony, I., Van Den Berg, A., Cobianu, C. & Kulinyi, S., ápr. 1998, In : Microelectronics Journal. 29, 4-5, p. 235-239 5 p.

Research output: Article

flammable gases
Porous silicon
Chemical sensors
porous silicon
Heat transfer

Modified C-t technique for determining the generation lifetime profile in MeV He+ implanted silicon

Mohácsy, T., Khánh, N. Q., Ádám, M. & Gyulai, J., júl. 1 1998, In : Vacuum. 50, 3-4, p. 399-401 3 p.

Research output: Article

Carrier lifetime
Silicon
carrier lifetime
Ion implantation
ion implantation
1997
60 Citations (Scopus)

Porous silicon bulk micromachining for thermally isolated membrane formation

Dücső, C., Vázsonyi, E., Ádám, M., Szabó, I., Bársony, I., Gardeniers, J. G. E. & Van Den Berg, A., máj. 1997, In : Sensors and Actuators: A. Physical. 60, 1-3, p. 235-239 5 p.

Research output: Article

Porous silicon
Micromachining
Silicon
micromachining
porous silicon
1996
8 Citations (Scopus)
Silicon
Ion implantation
Ion beams
submerging
ion implantation
1995
24 Citations (Scopus)

Investigation of electrical properties of Au porous Si Si structures

Ádám, M., Horváth, Z., Bársony, I., Szölgyémy, L., Vázsonyi, E. & Van Tuyen, V., jan. 15 1995, In : Thin Solid Films. 255, 1-2, p. 266-268 3 p.

Research output: Article

Porous silicon
Electric properties
Capacitance
Capacitance measurement
Porosity