• 585 Citations
  • 13 h-Index
19952012
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Fingerprint Dive into the research topics where M. Ádám is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

Engineering & Materials Science

Porous silicon
Membranes
Sensors
Ion implantation
Silicon
Chemical sensors
Micromachining
Plasmas
Crystalline materials
Fermi level
Doping (additives)
Temperature
Capacitance
Gases
Electric potential
Sensor arrays
Capacitance measurement
Electric properties
Defects
Pressure sensors
Metals
Voltage measurement
MEMS
Explosions
Electric power utilization
Equivalent circuits
Fabrication
Substrates
Deep level transient spectroscopy
Surface micromachining
Diodes
Ions
Wafer bonding
Humidity sensors
Microsensors
Packaging
Annealing
Resistors
Masks
Oxides
Silicon nitride
Hot Temperature
Thermodynamic properties
Carrier lifetime
Electrostatic force
Ohmic contacts
Hydrocarbons
Heterojunctions
Butane
Infrared imaging

Chemical Compounds

Porous silicon
Silicon
Membranes
Chemical sensors
Ion implantation
Sensors
Gases
Plasmas
Fermi level
Metals
Electric potential
Temperature
Capacitance
Doping (additives)
Micromachining
Capacitance measurement
Electric properties
Crystalline materials
Sensor arrays
Defects
Voltage measurement
Oxides
Explosions
Electric power utilization
Ions
Equivalent circuits
Hydrocarbons
Deep level transient spectroscopy
Diodes
Fabrication
Substrates
Humidity sensors
Microsensors
Propane
Annealing
Masks
Thermodynamic properties
Carrier lifetime
Ohmic contacts
Hot Temperature
Methane
Heterojunctions
Infrared imaging
Hexanes
Processing
Acetone
Charge carriers
Dislocations (crystals)
Passivation
Molecular beam epitaxy

Physics & Astronomy

Chemistry and Materials

porous silicon
silicon
flammable gases
gases
hydrocarbons
silicones
butanes
propane

General

sensors
membranes
heaters
ion implantation
submerging
implantation
equivalent circuits
wafers
defects
explosions
electric contacts
pressure sensors
filaments
temperature dependence
profiles
depletion
isolation
norms
transmitters
anomalies
passivity

Engineering

micromachining
capacitance
electrical properties
life (durability)
fabrication
electrical measurement
microelectromechanical systems
etching
diodes
capacitance-voltage characteristics
annealing
carrier lifetime
surface treatment
metal oxide semiconductors

Physics

electric potential
temperature
noise spectra
ions

Mathematical and Computer Sciences

sensitivity

Geosciences

mesas

Life Sciences

temperature effects