• 1032 Citations
  • 18 h-Index
1985 …2019

Research output per year

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Research Output

  • 1032 Citations
  • 18 h-Index
  • 70 Article
  • 21 Conference contribution
  • 17 Conference article
  • 2 Editorial
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Conference contribution
2016

3D force sensors for laparoscopic surgery tool

Rado, J., Dücső, C., Battistig, G., Szebenyi, G., Fürjes, P., Nawrat, Z. & Rohr, K., júl. 15 2016, Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2016. Institute of Electrical and Electronics Engineers Inc., 7514829

Research output: Conference contribution

2 Citations (Scopus)

Electron Microscopy Study on the Influence of B-implantation on Ni Induced Lateral Crystallization in Amorphous Si

Vouroutzis, N., Radnóczi, G. Z., Dodony, E., Battistig, G., Stoemenos, J., Pécz, B. & Frangis, N., 2016, Materials Today: Proceedings. 3 ed. Elsevier Ltd, Vol. 3. p. 825-831 7 p.

Research output: Conference contribution

2014

Electron microscopy study of Ni induced crystallization in amorphous Si thin films

Radnóczi, G. Z., Dodony, E., Battistig, G., Vouroutzis, N., Stoemenos, J., Frangis, N., Kovács, A. & Pécz, B., jan. 1 2014, International Conferences and Exhibition on Nanotechnologies and Organic Electronics, NANOTEXNOLOGY 2014 - Proceedings of NN 2014 and ISFOE 2014. Logothetidis, S., Laskarakis, A. & Gravalidis, C. (eds.). American Institute of Physics Inc., p. 31-37 7 p. (AIP Conference Proceedings; vol. 1646).

Research output: Conference contribution

Open Access
2012

Deep-brain silicon multielectrodes with surface-modified Pt recording sites

Marton, G., Fekete, Z., Bakos, I., Battistig, G., Pongracz, A., Baracskay, P., Juhasz, G. & Barsony, I., dec. 1 2012, IEEE SENSORS 2012 - Proceedings. 6411325. (Proceedings of IEEE Sensors).

Research output: Conference contribution

1 Citation (Scopus)

Electrostatic force detection during anodic wafer bonding

Kárpáti, T., Pap, A. E., Ádám, M., Ferencz, J., Fürjes, P., Battistig, G. & Bársony, I., dec. 1 2012, IEEE SENSORS 2012 - Proceedings. 6411331. (Proceedings of IEEE Sensors).

Research output: Conference contribution

Flexible packaging for tyre integrated shear force sensor

Kulinyi, S., Vegvari, R., Pongracz, A., Nagy, A., Karpati, T., Adam, M., Battistig, G. & Bársony, I., dec. 1 2012, IEEE SENSORS 2012 - Proceedings. 6411326. (Proceedings of IEEE Sensors).

Research output: Conference contribution

1 Citation (Scopus)

The influence of C 3H 8 and CBr 4 on structural and morphological properties of 3C-SiC layers

Attolini, G., Bosi, M., Watts, B. E., Battistig, G., Dobos, L. & Pécz, B., febr. 15 2012, HeteroSiC and WASMPE 2011. p. 22-26 5 p. (Materials Science Forum; vol. 711).

Research output: Conference contribution

2011

THz detection by modified thermopile

Szentpáli, B., Matyi, G., Fürjes, P., László, E., Battistig, G., Bársony, I., Károlyi, G. & Berceli, T., júl. 25 2011, Smart Sensors, Actuators, and MEMS V. 80661R. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8066).

Research output: Conference contribution

1 Citation (Scopus)
2010

Selective growth of nanocrystalline 3C-SiC thin films on Si

Beke, D., Pongrácz, A., Battistig, G., Josepovits, K. & Pécz, B., dec. 1 2010, 2010 Wide Bandgap Cubic Semiconductors: From Growth to Devices - Proceedings of the E-MRS Symposium F. p. 23-26 4 p. (AIP Conference Proceedings; vol. 1292).

Research output: Conference contribution

SiC epitaxial growth on Si(100) substrates using carbon tetrabromide

Attolini, G., Bosi, M., Rossi, F., Watts, B. E., Salviati, G., Battistig, G., Dobos, L. & Pécz, B., jan. 1 2010, Silicon Carbide and Related Materials 2009: ICSCRM 2009. Trans Tech Publications Ltd, p. 139-142 4 p. (Materials Science Forum; vol. 645-648).

Research output: Conference contribution

1 Citation (Scopus)

Thermopile as THz detector

Szentpáli, B., Basa, P., Fürjes, P., Battistig, G. & Bársony, I., dec. 20 2010, Proceedings - 10th International Conference on Laser and Fiber-Optical Networks Modeling, LFNM'2010, 2nd IEEE International Workshop on THz Radiation: Basic Research and Applications, TERA'2010. p. 275-277 3 p. 5619943. (Proceedings - 10th International Conference on Laser and Fiber-Optical Networks Modeling, LFNM'2010, 2nd IEEE International Workshop on THz Radiation: Basic Research and Applications, TERA'2010).

Research output: Conference contribution

1 Citation (Scopus)
2009

Homogeneity check of ion implantation in silicon by wide-angle ellipsometry

Fried, M., Juhász, G., Major, C., Petrik, P. & Battistig, G., dec. 1 2009, 17th IEEE Conference on Advanced Thermal Processing of Semiconductors, RTP 2009. 5373448. (17th IEEE Conference on Advanced Thermal Processing of Semiconductors, RTP 2009).

Research output: Conference contribution

1 Citation (Scopus)

Silicon surface preparation and passivation by vapor phase of heavy water

Pap, A. E., Nényei, Z., Battistig, G. & Bársony, I., jan. 1 2009, Ultra Clean Processing of Semiconductor Surfaces IX: UCPSS 2008. Trans Tech Publications Ltd, p. 181-184 4 p. (Solid State Phenomena; vol. 145-146).

Research output: Conference contribution

1 Citation (Scopus)
2008

Heavy water in gate stack processing

Pap, A. E., Dücso, C., Kamaras, K., Battistig, G. & Bársony, I., jan. 1 2008, Rapid Thermal Processing and Beyond: Applications in Semiconductor Processing - Selected papers from RTP specialists all over the world. Trans Tech Publications Ltd, p. 119-131 13 p. (Materials Science Forum; vol. 573-574).

Research output: Conference contribution

2 Citations (Scopus)

Si surface preparation and passivation by vapor phase of heavy water

Edit Pap, A., Petrik, P., Pecz, B., Battistig, G., Barsony, I., Szekrenyes, Z., Kamaras, K., Schay, Z. & Nenyei, Z., dec. 1 2008, 16th IEEE International Conference on Advanced Thermal Processing of Semiconductors, RTP 2008. p. 219-228 10 p. 4690558. (16th IEEE International Conference on Advanced Thermal Processing of Semiconductors, RTP 2008).

Research output: Conference contribution

1 Citation (Scopus)
2007

Sacrificial deuterium passivation for improved interface engineering in gate stack processing

Pap, A. E., Battistig, G., Dücso, C., Bársony, I., Kamarás, K., Nenyei, Z., Dietl, W. & Kirchner, C., dec. 1 2007, 15th IEEE International Conference on Advanced Thermal Processing of Semiconductors, RTP 2007. p. 57-63 7 p. 4383819. (15th IEEE International Conference on Advanced Thermal Processing of Semiconductors, RTP 2007).

Research output: Conference contribution

2 Citations (Scopus)
2006

Nucleation of SiC nanocrystals at the Si/SiO2 interface: Effect of the interface properties

Pongrácz, A., Battistig, G., Tóth, A. L., Makkai, Z., Dücsö, C., Josepovits, K. V. & Bársony, I., márc. 1 2006, Proceedings - ICFSI-10 - 10th International Conference on the Formation of Semiconductor Interfaces. p. 133-136 4 p. (Journal De Physique. IV : JP; vol. 132).

Research output: Conference contribution

6 Citations (Scopus)
2005

Ion beam analysis and computer simulation of damage accumulation in nitrogen implanted 6H-SiC: Effects of channeling

Zolnai, Z., Ster, A., Khánh, N. Q., Kótai, E., Posselt, M., Battistig, G., Lohner, T. & Gyulai, J., dec. 1 2005, Silicon Carbide and Related Materials 2004, ECSCRM 2004 - Proceedings of 5th European Conference on Silicon Carbide and Related Materials. p. 637-640 4 p. (Materials Science Forum; vol. 483-485).

Research output: Conference contribution

RBS-channeling and EPR studies of damage in 2 MeV Al2+-implanted 6H-SiC substrates

Morilla, Y., López, J. G., Battistig, G., Cantin, J. L., Cheang-Wong, J. C., Von Bardeleben, H. J. & Respaldiza, M. A., dec. 1 2005, Silicon Carbide and Related Materials 2004, ECSCRM 2004 - Proceedings of 5th European Conference on Silicon Carbide and Related Materials. p. 291-294 4 p. (Materials Science Forum; vol. 483-485).

Research output: Conference contribution

2 Citations (Scopus)
2003

High-Sensitivity Ion Beam Analytical Method for Studying Ion-Implanted SiC

Battistig, G., Garcia Lopez, J., Khanh, N. Q., Morilla, Y., Respaldiza, M. A. & Szilágyi, E., jan. 1 2003, Materials Science Forum. Bergman, P. & Janzén, E. (eds.). Trans Tech Publications Ltd, p. 625-628 4 p. (Materials Science Forum; vol. 433-436).

Research output: Conference contribution

4 Citations (Scopus)
2000

Ion implantation induced damage in silicon carbide studied by Non-Rutherford elastic backscattering

Szilágyi, E., Kótai, E., Khánh, N. Q., Zolnai, Z., Battistig, G., Lohner, T. & Gyulai, J., dec. 1 2000, 2000 International Conference on Ion Implantation Technology, IIT 2000 - Proceedings. p. 131-134 4 p. 924108. (Proceedings of the International Conference on Ion Implantation Technology).

Research output: Conference contribution

4 Citations (Scopus)