• 1076 Citations
  • 19 h-Index
1983 …2015
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Research Output 1983 2015

  • 1076 Citations
  • 19 h-Index
  • 41 Article
  • 7 Conference contribution
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Article
2015
4 Citations (Scopus)

The chemical resistance of nano-sized SiC rich composite coating

Gurbán, S., Kotis, L., Pongracz, A., Sulyok, A., Tóth, A., Vázsonyi, E. & Menyhárd, M., jan. 15 2015, In : Surface and Coatings Technology. 261, p. 195-200 6 p.

Research output: Article

Chemical resistance
Composite coatings
Etching
coatings
composite materials
2011
24 Citations (Scopus)

A novel multisite silicon probe for high quality laminar neural recordings

Grand, L., Pongrácz, A., Vázsonyi, E., Márton, G., Gubán, D., Fiáth, R., Kerekes, B. P., Karmos, G., Ulbert, I. & Battistig, G., márc. 2011, In : Sensors and Actuators: A. Physical. 166, 1, p. 14-21 8 p.

Research output: Article

Silicon
Wet etching
recording
probes
silicon
2009
25 Citations (Scopus)
porous silicon
ellipsometry
nanocrystals
critical point
approximation
2008
21 Citations (Scopus)

CMOS integrated tactile sensor array by porous Si bulk micromachining

Ádám, M., Mohácsy, T., Jónás, P., Dücső, C., Vázsonyi, E. & Bársony, I., márc. 10 2008, In : Sensors and Actuators: A. Physical. 142, 1, p. 192-195 4 p.

Research output: Article

Porous silicon
Micromachining
Sensor arrays
Silicon
micromachining
2007
13 Citations (Scopus)

Brillouin light scattering from porous silicon films and multilayers

Andrews, G. T., Polomska, A. M., Vázsonyi, E. & Volk, J., máj. 2007, In : Physica Status Solidi (A) Applications and Materials Science. 204, 5, p. 1372-1377 6 p.

Research output: Article

Brillouin scattering
Porous silicon
silicon films
porous silicon
Light scattering
5 Citations (Scopus)
Anisotropic etching
Silicon
etching
Oxidation
oxidation
2006
34 Citations (Scopus)

Characterization of an integrable single-crystalline 3-D tactile sensor

Vásárhelyi, G., Ádám, M., Vázsonyi, E., Vízváry, Z., Kis, A., Bársony, I. & Dücső, C., aug. 2006, In : IEEE Sensors Journal. 6, 4, p. 928-934 7 p., 1661573.

Research output: Article

Crystalline materials
sensors
Sensors
micromachining
membranes
33 Citations (Scopus)

Effects of the elastic cover on tactile sensor arrays

Vásárhelyi, G., Ádám, M., Vázsonyi, E., Bársony, I. & Dücső, C., nov. 8 2006, In : Sensors and Actuators: A. Physical. 132, 1 SPEC. ISS., p. 245-251 7 p.

Research output: Article

Sensor arrays
sensors
Sensors
hair
rubber
14 Citations (Scopus)

Ellipsometric characterization of nanocrystals in porous silicon

Petrik, P., Fried, M., Vázsonyi, E., Lohner, T., Horváth, E., Polgár, O., Basa, P., Bársony, I. & Gyulai, J., okt. 31 2006, In : Applied Surface Science. 253, 1 SPEC. ISS., p. 200-203 4 p.

Research output: Article

Porous silicon
porous silicon
Nanocrystals
nanocrystals
Crystalline materials
2005
28 Citations (Scopus)

Three-dimensional force sensor by novel alkaline etching technique

Vázsonyi, E., Ádám, M., Dücs, C., Vízváry, Z., Tóth, A. & Bársony, I., szept. 23 2005, In : Sensors and Actuators: A. Physical. 123-124, p. 620-626 7 p.

Research output: Article

Etching
etching
membranes
Membranes
sensors
2004
4 Citations (Scopus)

Characteristics of FeSi2 quantum dots on silicon

Dózsa, L., Horváth, E., Molnár, G., Tóth, A., Vértesy, Z., Vázsonyi, E. & Pető, G., júl. 2004, In : EPJ Applied Physics. 27, 1-3, p. 85-88 4 p.

Research output: Article

Silicon
Semiconductor quantum dots
quantum dots
MIS devices
silicon
2003
27 Citations (Scopus)
Silicon
Etching
etching
silicon
Passivation
2001

Combined analyses of ion beam synthesized layers in porous silicon

Ramos, A. R., Pászti, F., Horváth, Z., Vázsonyi, E., Conde, O., Da Silva, M. F., Da Silva, M. R. & Soares, J. C., 2001, In : Acta Physica Polonica A. 100, 5, p. 773-780 8 p.

Research output: Article

porous silicon
ion beams
impurities
implantation
fluence
70 Citations (Scopus)

Porous silicon formation by stain etching

Vázsonyi, E., Szilágyi, E., Petrik, P., Horváth, Z., Lohner, T., Fried, M. & Jalsovszky, G., jún. 1 2001, In : Thin Solid Films. 388, 1-2, p. 295-302 8 p.

Research output: Article

Porous silicon
Silicon
porous silicon
Etching
Coloring Agents
3 Citations (Scopus)

Synthesis of cobalt silicide on porous silicon by high dose ion implantation

Ramos, A. R., Pászti, F., Kotai, E., Vázsonyi, E., Conde, O., Da Silva, M. R., Da Silva, M. F. & Soares, J. C., máj. 2001, In : Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 178, 1-4, p. 283-286 4 p.

Research output: Article

Porous silicon
Cobalt
porous silicon
Ion implantation
ion implantation
2000
9 Citations (Scopus)

Ion beam synthesis of chromium silicide on porous silicon

Ramos, A. R., Conde, O., Pászti, F., Battistig, G., Vázsonyi, E., Da Silva, M. R., Da Silva, M. F. & Soares, J. C., márc. 2000, In : Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 161, p. 926-930 5 p.

Research output: Article

Porous silicon
Chromium
porous silicon
Ion beams
chromium
3 Citations (Scopus)

Pore propagation directions in P+ porous silicon

Vázsonyi, É., Battistig, G., Horváth, Z. E., Fried, M., Kádár, G., Pászti, F., Cantin, J. L., Vanhaeren, D., Stalmans, L. & Poortmans, J., 2000, In : Journal of Porous Materials. 7, 1, p. 57-61 5 p.

Research output: Article

Porous silicon
porous silicon
porosity
propagation
wafers
3 Citations (Scopus)

Small angle neutron scattering in P+-doped porous silicon

Kádár, G., Vázsonyi, E., Borbély, S. & Káli, G., 2000, In : Journal of Porous Materials. 7, 1, p. 331-334 4 p.

Research output: Article

Porous silicon
Neutron scattering
porous silicon
neutron scattering
wafers
1999
203 Citations (Scopus)

Improved anisotropic etching process for industrial texturing of silicon solar cells

Vázsonyi, E., De Clercq, K., Einhaus, R., Van Kerschaver, E., Said, K., Poortmans, J., Szlufcik, J. & Nijs, J., 1999, In : Solar Energy Materials and Solar Cells. 57, 2, p. 179-188 10 p.

Research output: Article

Anisotropic etching
Texturing
Silicon solar cells
Etching
Sodium Hydroxide
1998
19 Citations (Scopus)

Characterization of ITO/porous silicon LED structures

Molnár, K., Mohácsy, T., Varga, P., Vázsonyi, E. & Bársony, I., dec. 1998, In : Journal of Luminescence. 80, 1-4, p. 91-97 7 p.

Research output: Article

Nanowires
Quantum Dots
Porous silicon
Electroluminescence
Silicon
18 Citations (Scopus)
Backscattering
Spectrometry
backscattering
spectroscopy
porosity
75 Citations (Scopus)

Porous silicon in crystalline silicon solar cells: A review and the effect on the internal quantum efficiency

Stalmans, L., Poortmans, J., Bender, H., Caymax, M., Said, K., Vázsonyi, E., Nijs, J. & Mertens, R., júl. 1998, In : Progress in Photovoltaics: Research and Applications. 6, 4, p. 233-246 14 p.

Research output: Article

Porous silicon
Silicon solar cells
porous silicon
Quantum efficiency
quantum efficiency

Spectroellipsometry and electron spectroscopy of porous Si thin films on p+ substrates

Robert, C., Bideux, L., Gruzza, B., Cadoret, M., Lohner, T., Fried, M., Vázsonyi, E. & Gergely, G., ápr. 1 1998, In : Thin Solid Films. 317, 1-2, p. 210-213 4 p.

Research output: Article

Electron spectroscopy
electron spectroscopy
Thin films
Substrates
thin films
1997
63 Citations (Scopus)

Efficiency improvement by porous silicon coating of multicrystalline solar cells

Krotkus, A., Grigoras, K., Pačebutas, V., Bársony, I., Vázsonyi, E., Fried, M., Szlufcik, J., Nijs, J. & Levy-Clement, C., febr. 15 1997, In : Solar Energy Materials and Solar Cells. 45, 3, p. 267-273 7 p.

Research output: Article

Porous silicon
Energy conversion
Passivation
Short circuit currents
Conversion efficiency
11 Citations (Scopus)

Elastic reflection of electrons by porous silicon layered (PSL) surfaces: Effects of porosity

Robert, C., Bideux, L., Gruzza, B., Vázsonyi, E. & Gergely, G., jún. 1 1997, In : Applied Surface Science. 115, 2, p. 111-115 5 p.

Research output: Article

Porous silicon
porous silicon
Porosity
porosity
Electrons
11 Citations (Scopus)

Investigation of the morphology of porous silicon by rutherford backscattering spectrometry

Szilágyi, E., Hajnal, Z., Pászti, F., Buiu, O., Craciun, G., Cobianu, C., Savaniu, C. & Vázsonyi, E., 1997, In : Materials Science Forum. 248-249, p. 373-376 4 p.

Research output: Article

Porous silicon
Rutherford backscattering spectroscopy
porous silicon
Spectrometry
backscattering
61 Citations (Scopus)

Porous silicon bulk micromachining for thermally isolated membrane formation

Dücső, C., Vázsonyi, E., Ádám, M., Szabó, I., Bársony, I., Gardeniers, J. G. E. & Van Den Berg, A., máj. 1997, In : Sensors and Actuators: A. Physical. 60, 1-3, p. 235-239 5 p.

Research output: Article

Porous silicon
Micromachining
Silicon
micromachining
porous silicon
2 Citations (Scopus)

Small-angle neutron scattering in porous silicon

Kádár, G., Káli, G., Dücső, C. & Vázsonyi, E., jún. 2 1997, In : Physica B: Condensed Matter. 234-236, p. 1014-1015 2 p.

Research output: Article

Porous silicon
Neutron scattering
porous silicon
neutron scattering
wafers
1996
30 Citations (Scopus)

Anodic oxidation of p- and p+-type porous silicon: Surface structural transformations and oxide formation

Cantin, J. L., Schoisswohl, M., Grosman, A., Lebib, S., Ortega, C., Von Bardeleben, H. J., Vázsonyi, E., Jalsovszky, G. & Erostyák, J., ápr. 15 1996, In : Thin Solid Films. 276, 1-2, p. 76-79 4 p.

Research output: Article

Porous silicon
Anodic oxidation
porous silicon
Oxides
oxidation
5 Citations (Scopus)
Porous silicon
porous silicon
Ion implantation
implantation
Heat treatment
46 Citations (Scopus)

Characterization of different porous silicon structures by spectroscopic ellipsometry

Fried, M., Lohner, T., Polgár, O., Petrik, P., Vázsonyi, E., Bársony, I., Piel, J. P. & Stehle, J. L., ápr. 15 1996, In : Thin Solid Films. 276, 1-2, p. 223-227 5 p.

Research output: Article

Spectroscopic ellipsometry
Argon
Porous silicon
porous silicon
ellipsometry
15 Citations (Scopus)
Noble Gases
Porous silicon
densification
Inert gases
porous silicon
24 Citations (Scopus)

Thermal nitridation of p-type porous silicon in ammonia

Morazzani, V., Cantin, J. L., Ortega, C., Pajot, B., Rahbi, R., Rosenbauer, M., Von Bardeleben, H. J. & Vázsonyi, E., ápr. 15 1996, In : Thin Solid Films. 276, 1-2, p. 32-35 4 p.

Research output: Article

Nitridation
Porous silicon
porous silicon
Ammonia
ammonia
1995
2 Citations (Scopus)
Electron spectroscopy
Valence bands
electron spectroscopy
Atomic force microscopy
Adatoms
5 Citations (Scopus)
Cathodoluminescence
Electron energy loss spectroscopy
Porous silicon
cathodoluminescence
porous silicon
24 Citations (Scopus)

Investigation of electrical properties of Au porous Si Si structures

Ádám, M., Horváth, Z., Bársony, I., Szölgyémy, L., Vázsonyi, E. & Van Tuyen, V., jan. 15 1995, In : Thin Solid Films. 255, 1-2, p. 266-268 3 p.

Research output: Article

Porous silicon
Electric properties
Capacitance
Capacitance measurement
Porosity
1994
8 Citations (Scopus)

Electron spectroscopy of porous silicon layers. Indirect detection of hydrogen by elastic peak electron spectroscopy

Gergely, G., Gruzza, B., Bideux, L., Bondot, P., Jardin, C. & Vázsonyi, E., jan. 1 1994, In : Surface and Interface Analysis. 22, 1, p. 271-274 4 p.

Research output: Article

Electron spectroscopy
Porous silicon
porous silicon
electron spectroscopy
Hydrogen
1993
24 Citations (Scopus)
porous silicon
photoluminescence
nanoparticles
blue shift
excitation
33 Citations (Scopus)
Luminescence
Hydrogen
luminescence
Photoluminescence
hydrogen
1986
2 Citations (Scopus)

Characterization of UV hardening process

Vázsonyi, E., Holly, S. & Vértesy, Z., 1986, In : Microelectronic Engineering. 5, 1-4, p. 341-347 7 p.

Research output: Article

Excimer lasers
Phenol
Heat resistance
Ultraviolet radiation
hardening
1985

Characterization of a two-layer resist

Vázsonyi, E., Vértesy, Z. & Holly, S., 1985, In : Microelectronic Engineering. 3, 1-4, p. 525-532 8 p.

Research output: Article

Photoresists
Ultraviolet radiation
Erosion
Infrared spectroscopy
Thermodynamic stability