• 718 Citations
  • 15 h-Index
19952016

Research output per year

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Research Output

  • 718 Citations
  • 15 h-Index
  • 32 Article
  • 11 Conference contribution
  • 9 Conference article
  • 4 Paper
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Conference contribution
2016

3D force sensors for laparoscopic surgery tool

Rado, J., Dücső, C., Battistig, G., Szebenyi, G., Fürjes, P., Nawrat, Z. & Rohr, K., júl. 15 2016, Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2016. Institute of Electrical and Electronics Engineers Inc., 7514829

Research output: Conference contribution

2 Citations (Scopus)
2008

Heavy water in gate stack processing

Pap, A. E., Dücso, C., Kamaras, K., Battistig, G. & Bársony, I., jan. 1 2008, Rapid Thermal Processing and Beyond: Applications in Semiconductor Processing - Selected papers from RTP specialists all over the world. Trans Tech Publications Ltd, p. 119-131 13 p. (Materials Science Forum; vol. 573-574).

Research output: Conference contribution

1 Citation (Scopus)

Integrated tactile system for dynamic 3D contact force mapping

Vásárhelyi, G., Ádám, M., Dücsö, C., Bársony, I. & Kis, A., dec. 1 2008, 2008 IEEE Sensors, SENSORS 2008. p. 791-794 4 p. 4716560. (Proceedings of IEEE Sensors).

Research output: Conference contribution

2 Citations (Scopus)
2007

Micro-hotplates for thermal characterisation of structural materials of MEMS

Fürjes, P., Csíkvári, P., Bársony, I. & Dücso, C., dec. 1 2007, Collection of Papers Presented at The 13th International Workshop on THERMal INvestigation of Ics and Systems, THERMINIC 2007. p. 184-188 5 p. 4451774. (Collection of Papers Presented at The 13th International Workshop on THERMal INvestigation of ICs and Systems, THERMINIC).

Research output: Conference contribution

3 Citations (Scopus)

Sacrificial deuterium passivation for improved interface engineering in gate stack processing

Pap, A. E., Battistig, G., Dücso, C., Bársony, I., Kamarás, K., Nenyei, Z., Dietl, W. & Kirchner, C., dec. 1 2007, 15th IEEE International Conference on Advanced Thermal Processing of Semiconductors, RTP 2007. p. 57-63 7 p. 4383819. (15th IEEE International Conference on Advanced Thermal Processing of Semiconductors, RTP 2007).

Research output: Conference contribution

2 Citations (Scopus)
2006

Carbon nanotubes - Towards artificial nose implementation

Koos, A. A., Kertesz, K., Adam, M., Ducso, C., Horvath, Z. E., Biro, L. P., Barsony, I., Gyulai, J., Konya, Z. & Kiricsi, I., dec. 1 2006, 2006 5th IEEE Conference on Sensors. p. 1395-1399 5 p. 4178887. (Proceedings of IEEE Sensors).

Research output: Conference contribution

Nucleation of SiC nanocrystals at the Si/SiO2 interface: Effect of the interface properties

Pongrácz, A., Battistig, G., Tóth, A. L., Makkai, Z., Dücsö, C., Josepovits, K. V. & Bársony, I., márc. 1 2006, Proceedings - ICFSI-10 - 10th International Conference on the Formation of Semiconductor Interfaces. p. 133-136 4 p. (Journal De Physique. IV : JP; vol. 132).

Research output: Conference contribution

6 Citations (Scopus)
2003

Response of SnO2 and ZnO adsorptive gas sensors on polluting gases

Fedak, V., Szasz, C., Ducso, C., Barsony, I. & Kokenyesi, S., jan. 1 2003, 26th International Spring Seminar on Electronics Technology: Integrated Management of Electronic Materials Production, ISSE 2003 - Conference Proceedings. Pietrikova, A. & Urbancik, J. (eds.). IEEE Computer Society, p. 68-70 3 p. 1260485. (Proceedings of the International Spring Seminar on Electronics Technology; vol. 2003-January).

Research output: Conference contribution

2001

Porous silicon as multifunctional material in MEMS

Mescheder, U. M., Kovacs, A., Kronast, W., Bársony, I., Adam, M. & Dücsö, C. S., jan. 1 2001, Proceedings of the 2001 1st IEEE Conference on Nanotechnology, IEEE-NANO 2001. IEEE Computer Society, p. 483-488 6 p. 966471. (Proceedings of the IEEE Conference on Nanotechnology; vol. 2001-January).

Research output: Conference contribution

7 Citations (Scopus)
1998

Ultrahigh Al Schottky barrier to p-Si

Horváth, Z., Adam, M., Van Tuyen, V. & Dücső, C., jan. 1 1998, ASDAM 1998 Conference Proceedings: 2nd International Conference on Advanced Semiconductor Devices And Microsystems. Uherek, F., Drobny, V., Breza, J. & Donoval, D. (eds.). Institute of Electrical and Electronics Engineers Inc., Vol. 1998-October. p. 83-86 4 p. 730172

Research output: Conference contribution

6 Citations (Scopus)
1995

Scanning infrared microscopy study of annealing behavior of interfacial micro-voids in direct bonded silicon

Khánh, N. Q., Hámori, A., Bársony, I., Dücsó, C. & Fried, M., jan. 1 1995, ESSDERC 1995 - Proceedings of the 25th European Solid State Device Research Conference. de Graaff, H. C., de Graaff, H. C. & van Kranenburg, H. (eds.). IEEE Computer Society, p. 145-148 4 p. 5435985. (European Solid-State Device Research Conference).

Research output: Conference contribution