• 718 Citations
  • 15 h-Index
19952016

Research output per year

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Research Output

  • 718 Citations
  • 15 h-Index
  • 32 Article
  • 11 Conference contribution
  • 9 Conference article
  • 4 Paper
2016

3D force sensors for laparoscopic surgery tool

Rado, J., Dücső, C., Battistig, G., Szebenyi, G., Fürjes, P., Nawrat, Z. & Rohr, K., júl. 15 2016, Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2016. Institute of Electrical and Electronics Engineers Inc., 7514829

Research output: Conference contribution

2 Citations (Scopus)
8 Citations (Scopus)
2015
15 Citations (Scopus)
12 Citations (Scopus)
2014

Effect of hexagonal WO3 morphology on NH3 sensing

Takács, M., Dücso, C., Lábadi, Z. & Pap, A. E., jan. 1 2014, In : Procedia Engineering. 87, p. 1011-1014 4 p.

Research output: Conference article

Open Access
7 Citations (Scopus)

Membrane platforms for sensors

Bársony, I., Dücso, C., Fürjes, P., Riesz, F., Hajnal, Z. & Battistig, G., jan. 1 2014, In : Procedia Engineering. 87, p. 871-878 8 p.

Research output: Conference article

Open Access
3 Citations (Scopus)
2013
3 Citations (Scopus)
2009

Efficient catalytic combustion in integrated micropellistors

Bársony, I., Ádám, M., Fürjes, P., Lucklum, R., Hirschfelder, M., Kulinyi, S. & Dücso, C., dec. 22 2009, In : Measurement Science and Technology. 20, 12, 124009.

Research output: Article

13 Citations (Scopus)

Micro-hotplates for thermal characterisation of structural materials of MEMS

Csíkvári, P., Fürjes, P., Dücso, C. & Bársony, I., szept. 1 2009, In : Microelectronics Journal. 40, 9, p. 1393-1397 5 p.

Research output: Article

3 Citations (Scopus)
26 Citations (Scopus)
2008

CMOS integrated tactile sensor array by porous Si bulk micromachining

Ádám, M., Mohácsy, T., Jónás, P., Dücso, C., Vázsonyi, É. & Bársony, I., márc. 10 2008, In : Sensors and Actuators, A: Physical. 142, 1, p. 192-195 4 p.

Research output: Article

23 Citations (Scopus)

Heavy water in gate stack processing

Pap, A. E., Dücso, C., Kamaras, K., Battistig, G. & Bársony, I., jan. 1 2008, Rapid Thermal Processing and Beyond: Applications in Semiconductor Processing - Selected papers from RTP specialists all over the world. Trans Tech Publications Ltd, p. 119-131 13 p. (Materials Science Forum; vol. 573-574).

Research output: Conference contribution

1 Citation (Scopus)

Integrated tactile system for dynamic 3D contact force mapping

Vásárhelyi, G., Ádám, M., Dücsö, C., Bársony, I. & Kis, A., dec. 1 2008, 2008 IEEE Sensors, SENSORS 2008. p. 791-794 4 p. 4716560. (Proceedings of IEEE Sensors).

Research output: Conference contribution

2 Citations (Scopus)
2007
6 Citations (Scopus)
7 Citations (Scopus)

Micro-hotplates for thermal characterisation of structural materials of MEMS

Fürjes, P., Csíkvári, P., Bársony, I. & Dücso, C., dec. 1 2007, Collection of Papers Presented at The 13th International Workshop on THERMal INvestigation of Ics and Systems, THERMINIC 2007. p. 184-188 5 p. 4451774. (Collection of Papers Presented at The 13th International Workshop on THERMal INvestigation of ICs and Systems, THERMINIC).

Research output: Conference contribution

3 Citations (Scopus)

Sacrificial deuterium passivation for improved interface engineering in gate stack processing

Pap, A. E., Battistig, G., Dücso, C., Bársony, I., Kamarás, K., Nenyei, Z., Dietl, W. & Kirchner, C., dec. 1 2007, 15th IEEE International Conference on Advanced Thermal Processing of Semiconductors, RTP 2007. p. 57-63 7 p. 4383819. (15th IEEE International Conference on Advanced Thermal Processing of Semiconductors, RTP 2007).

Research output: Conference contribution

2 Citations (Scopus)
7 Citations (Scopus)
5 Citations (Scopus)
2006

Carbon nanotubes - Towards artificial nose implementation

Koos, A. A., Kertesz, K., Adam, M., Ducso, C., Horvath, Z. E., Biro, L. P., Barsony, I., Gyulai, J., Konya, Z. & Kiricsi, I., dec. 1 2006, 2006 5th IEEE Conference on Sensors. p. 1395-1399 5 p. 4178887. (Proceedings of IEEE Sensors).

Research output: Conference contribution

Characterization of an integrable single-crystalline 3-D tactile sensor

Vásárhelyi, G., Ádám, M., Vázsonyi, É., Vízváry, Z., Kis, A., Bársony, I. & Dücsõ, C., aug. 1 2006, In : IEEE Sensors Journal. 6, 4, p. 928-934 7 p., 1661573.

Research output: Article

35 Citations (Scopus)

Effects of the elastic cover on tactile sensor arrays

Vásárhelyi, G., Ádám, M., Vázsonyi, É., Bársony, I. & Dücso, C., nov. 8 2006, In : Sensors and Actuators, A: Physical. 132, 1 SPEC. ISS., p. 245-251 7 p.

Research output: Article

33 Citations (Scopus)

Electrical and optical properties of Si-rich SiNx layers: Effect of annealing

Szöllosi, P., Basa, P., Dücso, C., Máté, B., Ádám, M., Lohner, T., Petrik, P., Pécz, B., Tóth, L., Dobos, L., Dózsa, L. & Horváth, Z. J., febr. 1 2006, In : Current Applied Physics. 6, 2, p. 179-181 3 p.

Research output: Conference article

2 Citations (Scopus)

Nucleation of SiC nanocrystals at the Si/SiO2 interface: Effect of the interface properties

Pongrácz, A., Battistig, G., Tóth, A. L., Makkai, Z., Dücsö, C., Josepovits, K. V. & Bársony, I., márc. 1 2006, Proceedings - ICFSI-10 - 10th International Conference on the Formation of Semiconductor Interfaces. p. 133-136 4 p. (Journal De Physique. IV : JP; vol. 132).

Research output: Conference contribution

6 Citations (Scopus)
2005

Olfactory detection of methane, propane, butane and hexane using conventional transmitter norms

Kulinyi, S., Brandszájsz, D., Amine, H., Ádám, M., Fürjes, P., Bársony, I. & Dücso, C., nov. 11 2005, In : Sensors and Actuators, B: Chemical. 111-112, SUPPL., p. 286-292 7 p.

Research output: Article

9 Citations (Scopus)
5 Citations (Scopus)
2004

Thermal characterisation of a direction dependent flow sensor

Fürjes, P., Légrádi, G., Dücso, C., Aszódi, A. & Bársony, I., szept. 21 2004, In : Sensors and Actuators, A: Physical. 115, 2-3 SPEC. ISS., p. 417-423 7 p.

Research output: Article

58 Citations (Scopus)

Thermal response of microfilament heaters in gas sensing

Bársony, I., Fürjes, P., Ádám, M., Dücso, C., Vízváry, Z., Zettner, J. & Stam, F., szept. 29 2004, In : Sensors and Actuators, B: Chemical. 103, 1-2, p. 442-447 6 p.

Research output: Article

14 Citations (Scopus)
8 Citations (Scopus)
2003
23 Citations (Scopus)

Microwave-CVD diamond protective coating for 3D structured silicon microsensors

Csorbai, H., Fürjes, P., Hárs, G., Dücso, C., Bársony, I., Kálmán, E. & Deák, P., jan. 1 2003, In : Materials Science Forum. 414-415, p. 69-74 6 p.

Research output: Conference article

2 Citations (Scopus)

Porous silicon-based humidity sensor with interdigital electrodes and internal heaters

Fürjes, P., Kovács, A., Dücso, C., Ádám, M., Müller, B. & Mescheder, U., okt. 15 2003, In : Sensors and Actuators, B: Chemical. 95, 1-3, p. 140-144 5 p.

Research output: Conference article

69 Citations (Scopus)

Reliability of micromachined catalytic gas sensors

Norman, A., Stam, F. & Dücso, C., dec. 1 2003, p. 1310-1313. 4 p.

Research output: Paper

1 Citation (Scopus)

Response of SnO2 and ZnO adsorptive gas sensors on polluting gases

Fedak, V., Szasz, C., Ducso, C., Barsony, I. & Kokenyesi, S., jan. 1 2003, 26th International Spring Seminar on Electronics Technology: Integrated Management of Electronic Materials Production, ISSE 2003 - Conference Proceedings. Pietrikova, A. & Urbancik, J. (eds.). IEEE Computer Society, p. 68-70 3 p. 1260485. (Proceedings of the International Spring Seminar on Electronics Technology; vol. 2003-January).

Research output: Conference contribution

2002
9 Citations (Scopus)
23 Citations (Scopus)

Thermal investigation of micro-filament heaters

Fürjes, P., Vizváry, Z., Ádám, M., Morrissey, A., Dücso, C. & Bársony, I., ápr. 30 2002, In : Sensors and Actuators, A: Physical. 99, 1-2, p. 98-103 6 p.

Research output: Article

18 Citations (Scopus)
2001

Porous silicon as multifunctional material in MEMS

Mescheder, U. M., Kovacs, A., Kronast, W., Bársony, I., Adam, M. & Dücsö, C. S., jan. 1 2001, Proceedings of the 2001 1st IEEE Conference on Nanotechnology, IEEE-NANO 2001. IEEE Computer Society, p. 483-488 6 p. 966471. (Proceedings of the IEEE Conference on Nanotechnology; vol. 2001-January).

Research output: Conference contribution

7 Citations (Scopus)

Recording of transmission phase gratings in glass by ion implantation

Bányász, I., Fried, M., Dücső, C. & Vértesy, Z., dec. 3 2001, In : Applied Physics Letters. 79, 23, p. 3755-3757 3 p.

Research output: Article

20 Citations (Scopus)
2000

A novel micro-structured reference material for ion and X-ray microbeam analysis

Wätjen, U., Bársony, I. & Dücsö, C., dec. 1 2000, In : Mikrochimica Acta. 132, 2-4, p. 521-525 5 p.

Research output: Article

4 Citations (Scopus)

A novel micro-structured reference material for microbeam analysis

Wätjen, U., Dücsö, C., Tajani, A., Munnik, F. & Lechtenberg, F., jan. 1 2000, In : Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 161-163, p. 359-365 7 p.

Research output: Conference article

7 Citations (Scopus)

Thermal modelling of a porous silicon-based pellistor-type catalytic flammable gas sensor with two supporting beams

Kolev, S. D., Ádám, M., Dücsö, C., Bársony, I., Cobianu, C. & Van Den Berg, A., máj. 2000, In : Microelectronics Journal. 31, 5, p. 339-342 4 p.

Research output: Article

6 Citations (Scopus)
1998

Anomalous temperature dependence of series resistance in Ag/Si and Al/Si Schottky junctions

Horváth, Z. J., Ádám, M., Pintér, I., Cvikl, B., Korošak, D., Mrdjen, T., Van Tuyen, V., Makaró, Z., Dücsö, C. & Bársony, I., júl. 1 1998, In : Vacuum. 50, 3-4, p. 417-419 3 p.

Research output: Article

7 Citations (Scopus)

Electrical characterisation of Al/n-Si/p-Si Schottky junctions prepared by plasma immersion implantation

Horváth, Z. J., Ádám, M., Dücsö, C., Pintér, I., Van Tuyen, V., Bársony, I., Gombia, E., Mosca, R. & Makaró, Z. S., márc. 16 1998, In : Solid-State Electronics. 42, 2, p. 221-228 8 p.

Research output: Article

23 Citations (Scopus)
6 Citations (Scopus)

Ultrahigh Al Schottky barrier to p-Si

Horváth, Z., Adam, M., Van Tuyen, V. & Dücső, C., jan. 1 1998, ASDAM 1998 Conference Proceedings: 2nd International Conference on Advanced Semiconductor Devices And Microsystems. Uherek, F., Drobny, V., Breza, J. & Donoval, D. (eds.). Institute of Electrical and Electronics Engineers Inc., Vol. 1998-October. p. 83-86 4 p. 730172

Research output: Conference contribution

6 Citations (Scopus)
1997

Identification of temperature profile and heat transfer on a dielectric membrane for gas sensors by `COSMOS' program simulation

Dumitrescu, M., Cobianu, C., Lungu, D., Dascalu, D., Pascu, A., van den Berg, A., Gardeniers, J. G. E., Kolev, S., Ducso, C. & Barsony, I., 1997, p. 145-148. 4 p.

Research output: Paper

Porous silicon bulk micromachining for thermally isolated membrane formation

Dücsö, C., Vázsonyi, É., Ádám, M., Szabó, I., Bársony, I. I., Gardeniers, J. G. E. & Van Den Berg, A., máj. 1997, In : Sensors and Actuators, A: Physical. 60, 1-3, p. 235-239 5 p.

Research output: Article

61 Citations (Scopus)

Porous silicon host matrix for deposition by atomic layer epitaxy

Utriainen, M., Lehto, S., Niinistö, L., Dücso, C., Khanh, N. Q., Horváth, Z. E., Bársony, I. & Pécz, B., ápr. 1 1997, In : Thin Solid Films. 297, 1-2, p. 39-42 4 p.

Research output: Article

30 Citations (Scopus)