• 503 Citations
  • 13 h-Index
20022017

Research output per year

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Research Output

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Conference contribution
2014

Multiphysics modelling of the fabrication and operation of a micro-pellistor device

Biró, F., Hajnal, Z., Pap, A. E. & Barsony, I., jan. 1 2014, 2014 15th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2014. IEEE Computer Society, 6813867. (2014 15th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2014).

Research output: Conference contribution

4 Citations (Scopus)
2012

Electrostatic force detection during anodic wafer bonding

Kárpáti, T., Pap, A. E., Ádám, M., Ferencz, J., Fürjes, P., Battistig, G. & Bársony, I., dec. 1 2012, IEEE SENSORS 2012 - Proceedings. 6411331. (Proceedings of IEEE Sensors).

Research output: Conference contribution

2009

Probing patterned wafer structures by means of grazing incidence x-ray fluorescence analysis

Osán, J., Reinhardt, F., Beckhoff, B., Pap, A. E. & Török, S., dec. 1 2009, ECS Transactions - Analytical Techniques for Semiconductor Materials and Process Characterization 6, ALTECH 2009. 3 ed. p. 441-451 11 p. (ECS Transactions; vol. 25, no. 3).

Research output: Conference contribution

5 Citations (Scopus)

Si3N4 based non-volatile memory structures with embedded Si and Ge nanocrystals

Horváth, Z. J., Basa, P., Jászi, T., Pap, A. E., Molnár, G., Kovalev, A., Wainstein, D. & Turmezei, P., nov. 20 2009, ISSE 2009: 32nd International Spring Seminar on Electronics Technology: Hetero System Integration, the path to New Solutions in the Modern Electronics - Conference Proceedings. 5206962. (ISSE 2009: 32nd International Spring Seminar on Electronics Technology: Hetero System Integration, the path to New Solutions in the Modern Electronics - Conference Proceedings).

Research output: Conference contribution

Silicon surface preparation and passivation by vapor phase of heavy water

Pap, A. E., Nényei, Z., Battistig, G. & Bársony, I., jan. 1 2009, Ultra Clean Processing of Semiconductor Surfaces IX: UCPSS 2008. Trans Tech Publications Ltd, p. 181-184 4 p. (Solid State Phenomena; vol. 145-146).

Research output: Conference contribution

1 Citation (Scopus)
2008

Heavy water in gate stack processing

Pap, A. E., Dücso, C., Kamaras, K., Battistig, G. & Bársony, I., jan. 1 2008, Rapid Thermal Processing and Beyond: Applications in Semiconductor Processing - Selected papers from RTP specialists all over the world. Trans Tech Publications Ltd, p. 119-131 13 p. (Materials Science Forum; vol. 573-574).

Research output: Conference contribution

1 Citation (Scopus)

SI3N4 based non-volatile memory structures with embedded Si nano crystals

Basa, P., Horváth, Z. J., Jászi, T., Pap, A. E., Moinár, G., Kovalev, A., Wainstein, D. & Turmezei, P., dec. 1 2008, ASDAM 2008 - Conference Proceedings of the 7th International Conference on Advanced Semiconductor Devices and Microsystems. p. 63-66 4 p. 4743359. (ASDAM 2008 - Conference Proceedings of the 7th International Conference on Advanced Semiconductor Devices and Microsystems).

Research output: Conference contribution

Si surface preparation and passivation by vapor phase of heavy water

Edit Pap, A., Petrik, P., Pecz, B., Battistig, G., Barsony, I., Szekrenyes, Z., Kamaras, K., Schay, Z. & Nenyei, Z., dec. 1 2008, 16th IEEE International Conference on Advanced Thermal Processing of Semiconductors, RTP 2008. p. 219-228 10 p. 4690558. (16th IEEE International Conference on Advanced Thermal Processing of Semiconductors, RTP 2008).

Research output: Conference contribution

1 Citation (Scopus)
2007

MNOS and MNS memory structures with embedded SI nanocrystals

Horváth, Z. J., Basa, P., Jászi, T., Nagy, K., Pap, A. E., SzabÓ, T. & Szollosi, P., dec. 1 2007, Proceedings of the International Conference on Physics, Chemistry and Application of Nanostructures, NANOMEETING 2007 - Reviews and Short Notes. p. 566-569 4 p. (Proceedings of the International Conference on Physics, Chemistry and Application of Nanostructures, NANOMEETING 2007 - Reviews and Short Notes).

Research output: Conference contribution

1 Citation (Scopus)

Sacrificial deuterium passivation for improved interface engineering in gate stack processing

Pap, A. E., Battistig, G., Dücso, C., Bársony, I., Kamarás, K., Nenyei, Z., Dietl, W. & Kirchner, C., dec. 1 2007, 15th IEEE International Conference on Advanced Thermal Processing of Semiconductors, RTP 2007. p. 57-63 7 p. 4383819. (15th IEEE International Conference on Advanced Thermal Processing of Semiconductors, RTP 2007).

Research output: Conference contribution

2 Citations (Scopus)
2006

Electrical and memory properties of non-volatile memory structures with embedded Si nanocrystals

Horváth, Z. J., Basa, P., Jászi, T., Pap, A. E., Szöllösi, P., Nagy, K. & Hardy, V., dec. 1 2006, Conference Proceedings - The 6th International Conference on Advanced Semiconductor Devices and Microsystems, ASDAM'06. p. 205-208 4 p. 4133114. (Conference Proceedings - The 6th International Conference on Advanced Semiconductor Devices and Microsystems, ASDAM'06).

Research output: Conference contribution

2005

Optical properties and applications of porous silicon

Pap, A. E., Kordás, K., Vähäkangas, J. & Uusimäki, A., dec. 1 2005, IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications. p. 139-140 2 p. 1540117. (IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications).

Research output: Conference contribution

1 Citation (Scopus)