XPS analysis of nano-thin films on substrate

S. F. Mao, Z. M. Zhang, K. Tőkési, A. Csík, J. Toth, R. J. Bereczky, Z. J. Ding

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

For a surface localized nano-structure, the XPS quantification based only on peak intensity analysis is inaccurate. In this work, we have developed an algorithm that is more elaborate and convenient for application to XPS quantification of nanoscale thin film on substrate by considering the background in a region of about 100 eV following the film signal peak. A W/SiO2 overlayer sample is investigated in this work. Theoretical evaluation of the spectra is compared with the experimental result and a pertinent algorithm is derived for application to the film thickness analysis.

Original languageEnglish
Pages (from-to)728-730
Number of pages3
JournalSurface and Interface Analysis
Volume40
Issue number3-4
DOIs
Publication statusPublished - Mar 2008

Fingerprint

X ray photoelectron spectroscopy
Thin films
Substrates
thin films
Film thickness
film thickness
evaluation

Keywords

  • Film thickness
  • Nano-thin film
  • XPS

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Colloid and Surface Chemistry

Cite this

Mao, S. F., Zhang, Z. M., Tőkési, K., Csík, A., Toth, J., Bereczky, R. J., & Ding, Z. J. (2008). XPS analysis of nano-thin films on substrate. Surface and Interface Analysis, 40(3-4), 728-730. https://doi.org/10.1002/sia.2800

XPS analysis of nano-thin films on substrate. / Mao, S. F.; Zhang, Z. M.; Tőkési, K.; Csík, A.; Toth, J.; Bereczky, R. J.; Ding, Z. J.

In: Surface and Interface Analysis, Vol. 40, No. 3-4, 03.2008, p. 728-730.

Research output: Contribution to journalArticle

Mao, SF, Zhang, ZM, Tőkési, K, Csík, A, Toth, J, Bereczky, RJ & Ding, ZJ 2008, 'XPS analysis of nano-thin films on substrate', Surface and Interface Analysis, vol. 40, no. 3-4, pp. 728-730. https://doi.org/10.1002/sia.2800
Mao, S. F. ; Zhang, Z. M. ; Tőkési, K. ; Csík, A. ; Toth, J. ; Bereczky, R. J. ; Ding, Z. J. / XPS analysis of nano-thin films on substrate. In: Surface and Interface Analysis. 2008 ; Vol. 40, No. 3-4. pp. 728-730.
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