X-TEM investigation of the Al-QC layer system developed at various Mn deposition rates

A. Csanády, L. Farkas, P. Barna, B. Pécz, G. Sáfrán, O. Geszti-Herkner

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

The effects of Mn deposition rate on the evolution of the icosahedral quasi-crystalline phase were studied in the case of high temperature sequential vapour deposition (HTSD) of Al and Mn. By increasing the Mn deposition rates at 250°C, the deposition results in the sequential formation of QC and a metallic Mn layer. Sources of Al diffusion with different activity have been detected which correspond to the defects (grain boundaries, dislocations) and are the sites where the voids develop in the host Al films when preparing thick (some 100 nm thick) QC films. These results support the nucleation-growth-coalescence-thickness growth model proposed for the description of the formation of QC films at HTSD preparation [P B Barna et al, Thin Solid Films, 193-194, 1 (1990)].

Original languageEnglish
Pages (from-to)673-675
Number of pages3
JournalVacuum
Volume43
Issue number5-7
DOIs
Publication statusPublished - 1992

Fingerprint

Deposition rates
Vapor deposition
Transmission electron microscopy
transmission electron microscopy
vapor deposition
Coalescence
Dislocations (crystals)
Thick films
coalescing
thick films
voids
Grain boundaries
Nucleation
grain boundaries
nucleation
Crystalline materials
Temperature
Defects
preparation
defects

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

X-TEM investigation of the Al-QC layer system developed at various Mn deposition rates. / Csanády, A.; Farkas, L.; Barna, P.; Pécz, B.; Sáfrán, G.; Geszti-Herkner, O.

In: Vacuum, Vol. 43, No. 5-7, 1992, p. 673-675.

Research output: Contribution to journalArticle

Csanády, A. ; Farkas, L. ; Barna, P. ; Pécz, B. ; Sáfrán, G. ; Geszti-Herkner, O. / X-TEM investigation of the Al-QC layer system developed at various Mn deposition rates. In: Vacuum. 1992 ; Vol. 43, No. 5-7. pp. 673-675.
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