Wide angle beam ellipsometry for extremely large samples

C. Major, G. Juhász, Z. Horváth, O. Polgar, M. Fried

Research output: Contribution to journalArticle

16 Citations (Scopus)

Abstract

Our aim was to make possible to use ellipsometry for mapping purposes during one measuring cycle even on large wafers or panels (several dm 2 area). The new technique (Patent pending: P0700366, 2007 [1]) (based on our wide-angle beam ellipsometry solution) uses non-collimated illumination with special mirror arrangement giving multiple-angle-of-incidence information. The prototype uses a so called RGB-laser (658, 532, 474 nm) as light source. The detection is almost without background. One rapid measuring cycle is enough to determine the polarization state at all the points inside the illuminated area. The collected data can be processed very fast providing nearly real-time thicknesses and/or refractive index maps over a large (several dm2) area of the sample surface even in the case of multi-layer samples. The method can be used for mapping (quality) control purposes in the case of large area solar cell table production lines even in vacuum chamber with 5-10 mm lateral resolution.

Original languageEnglish
Pages (from-to)1077-1080
Number of pages4
JournalPhysica Status Solidi (C) Current Topics in Solid State Physics
Volume5
Issue number5
DOIs
Publication statusPublished - 2008

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ellipsometry
cycles
patents
vacuum chambers
quality control
light sources
incidence
solar cells
illumination
prototypes
wafers
refractivity
mirrors
polarization
lasers

ASJC Scopus subject areas

  • Condensed Matter Physics

Cite this

Wide angle beam ellipsometry for extremely large samples. / Major, C.; Juhász, G.; Horváth, Z.; Polgar, O.; Fried, M.

In: Physica Status Solidi (C) Current Topics in Solid State Physics, Vol. 5, No. 5, 2008, p. 1077-1080.

Research output: Contribution to journalArticle

Major, C. ; Juhász, G. ; Horváth, Z. ; Polgar, O. ; Fried, M. / Wide angle beam ellipsometry for extremely large samples. In: Physica Status Solidi (C) Current Topics in Solid State Physics. 2008 ; Vol. 5, No. 5. pp. 1077-1080.
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