Vibrating capacitor method in the development of semiconductor gas sensors

Research output: Contribution to journalConference article

10 Citations (Scopus)

Abstract

Adsorption usually results in work function shifts on catalytically active surfaces such as semiconductor gas sensors. The purpose of the present article is to summarise the capabilities of the vibrating capacitor from the simplest adsorption-induced work function tests to the scanning, vibrating, capacitor-yielded olfactory pictures and other chemical pictures. After a brief history and review of theoretical bases, the latest results will be discussed in detail. Olfactory pictures from semiconductor surfaces give a new chance to improve the selectivity of gas analysis. Chemical pictures from thin SnO 2 layers produced by atomic layer epitaxy reveal the inhomogeneities of the technology. CPD maps taken from Pd nanolayer (activator)-covered surfaces help to find the best layer-depositing parameters for the activation process of the thin semiconductor gas sensor films.

Original languageEnglish
Pages (from-to)17-21
Number of pages5
JournalThin Solid Films
Volume490
Issue number1
DOIs
Publication statusPublished - Oct 21 2005
EventProceedings of the 4th International Workshop on Semiconductor Gas Sensors (SGS 2004) -
Duration: Sep 19 2004Sep 23 2004

Keywords

  • Chemical picture
  • Gas sensors
  • Interface potential
  • Semiconductor sensors
  • Surface potential
  • Vibrating capacitor
  • Work function

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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