Vibrating capacitor method in the development of semiconductor gas sensors

Research output: Chapter in Book/Report/Conference proceedingChapter


Adsorption usually results in work function shifts on catalytically active surfaces such as semiconductor gas sensors (SGS). The purpose of the present chapter is to summarise the capabilities of the surface potential sensitive vibrating capacitor in conjunction with semiconductor gas sensors. This review starts from the simplest, adsorption induced work-function tests and extends to scanning vibrating capacitor yielded olfactory pictures and other chemical pictures. The latest developments and results are discussed in detail after the brief history and review of the theoretical basis (vibrating capacitor, solid-gas interface, surface and interface potentials in semiconductor gas sensors). Olfactory pictures from semiconductor surfaces give a new chance to improve the selectivity of gas analysis. Chemical pictures from thin films and other surfaces may reveal the inhomogeneities of the gas sensor layer technology, thus the scanning vibrating capacitor is an excellent tool for solid state surface characterization.

Original languageEnglish
Title of host publicationScience and Technology of Chemiresistor Gas Sensors
PublisherNova Science Publishers, Inc.
Number of pages35
ISBN (Print)9781600215148
Publication statusPublished - Dec 1 2007


ASJC Scopus subject areas

  • Chemistry(all)

Cite this

Mizsei, J. (2007). Vibrating capacitor method in the development of semiconductor gas sensors. In Science and Technology of Chemiresistor Gas Sensors (pp. 297-331). Nova Science Publishers, Inc..