Vibrating capacitor

Applications in the research of semiconductor gas sensors

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Adsorption usually results in work function shifts on catalytically active surfaces such as semiconductor gas sensors. That is why the vibrating capacitor method is such a valuable tool for investigating gas sensor materials. The purpose of the present article is to summarise the capabilities of the vibrating capacitor from the simplest, adsorption induced work-function tests to the scanning vibrating capacitor yielded olfactory pictures and chemical pictures. After the brief summary the latest results will be discussed in detail, such as olfactory pictures from semiconductor surfaces, chemical pictures from thin SnO 2 layer produced by atomic layer epitaxy and chemical pictures from the Pd nanolayer (activator) covered surfaces.

Original languageEnglish
Title of host publicationProceedings of IEEE Sensors
EditorsD. Rocha, P.M. Sarro, M.J. Vellekoop
Pages947-950
Number of pages4
Volume2
Publication statusPublished - 2004
EventIEEE Sensors 2004 - Vienna, Austria
Duration: Oct 24 2004Oct 27 2004

Other

OtherIEEE Sensors 2004
CountryAustria
CityVienna
Period10/24/0410/27/04

Fingerprint

Chemical sensors
Capacitors
Semiconductor materials
Atomic layer epitaxy
Adsorption
Scanning

Keywords

  • Gas sensor
  • Surface potential
  • Vibrating capacitor
  • Work function

ASJC Scopus subject areas

  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

Cite this

Mizsei, J. (2004). Vibrating capacitor: Applications in the research of semiconductor gas sensors. In D. Rocha, P. M. Sarro, & M. J. Vellekoop (Eds.), Proceedings of IEEE Sensors (Vol. 2, pp. 947-950). [T4L-A.3]

Vibrating capacitor : Applications in the research of semiconductor gas sensors. / Mizsei, J.

Proceedings of IEEE Sensors. ed. / D. Rocha; P.M. Sarro; M.J. Vellekoop. Vol. 2 2004. p. 947-950 T4L-A.3.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Mizsei, J 2004, Vibrating capacitor: Applications in the research of semiconductor gas sensors. in D Rocha, PM Sarro & MJ Vellekoop (eds), Proceedings of IEEE Sensors. vol. 2, T4L-A.3, pp. 947-950, IEEE Sensors 2004, Vienna, Austria, 10/24/04.
Mizsei J. Vibrating capacitor: Applications in the research of semiconductor gas sensors. In Rocha D, Sarro PM, Vellekoop MJ, editors, Proceedings of IEEE Sensors. Vol. 2. 2004. p. 947-950. T4L-A.3
Mizsei, J. / Vibrating capacitor : Applications in the research of semiconductor gas sensors. Proceedings of IEEE Sensors. editor / D. Rocha ; P.M. Sarro ; M.J. Vellekoop. Vol. 2 2004. pp. 947-950
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