The introduction summarizes methods for investigation of cathode sputtering and factors influencing cathode sputtering. The sputtering of plane and hollow cathodes cooled with liquid air and made of aluminium were studied as a function of voltage, current intensity, pressure of argon gas and the quality of the surface. The quantity of aluminium deposited on a cool surface of glass was measured by spectrophotometry after dissolution with diluted NaOH solution. The surface of the cathode was studied with an electron microscope. The results show that the degree of cathode sputtering increases directly proportional to the voltage using both types of cathodes, but that the quantity of sputtered aluminium using a hollow cathode with the same experimental parameters is seven times less than with a plane cathode.
ASJC Scopus subject areas
- Analytical Chemistry
- Atomic and Molecular Physics, and Optics