Vacancy-acceptor complexes in germanium produced by ion implantation

U. Feuser, R. Vianden, E. Alves, M. F. da Silva, E. Szilágyi, F. Pászti, J. C. Soares

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Combining results obtained by the γ-γ perturbed angular correlation method, Rutherford backscattering and elastic recoil detection of hydrogen, a defect complex formed in germanium by indium implantation is identified as a vacancy trapped by the indium probe.

Original languageEnglish
Pages (from-to)1049-1052
Number of pages4
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume59-60
Issue numberPART 2
DOIs
Publication statusPublished - Jul 1 1991

Fingerprint

Germanium
Indium
Ion implantation
Vacancies
indium
ion implantation
germanium
Correlation methods
Rutherford backscattering spectroscopy
angular correlation
Hydrogen
implantation
backscattering
Defects
probes
defects
hydrogen

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Instrumentation
  • Surfaces and Interfaces

Cite this

Vacancy-acceptor complexes in germanium produced by ion implantation. / Feuser, U.; Vianden, R.; Alves, E.; da Silva, M. F.; Szilágyi, E.; Pászti, F.; Soares, J. C.

In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 59-60, No. PART 2, 01.07.1991, p. 1049-1052.

Research output: Contribution to journalArticle

@article{706778d77fd34cacaa89e08027e3f83f,
title = "Vacancy-acceptor complexes in germanium produced by ion implantation",
abstract = "Combining results obtained by the γ-γ perturbed angular correlation method, Rutherford backscattering and elastic recoil detection of hydrogen, a defect complex formed in germanium by indium implantation is identified as a vacancy trapped by the indium probe.",
author = "U. Feuser and R. Vianden and E. Alves and {da Silva}, {M. F.} and E. Szil{\'a}gyi and F. P{\'a}szti and Soares, {J. C.}",
year = "1991",
month = "7",
day = "1",
doi = "10.1016/0168-583X(91)95762-3",
language = "English",
volume = "59-60",
pages = "1049--1052",
journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",
issn = "0168-583X",
publisher = "Elsevier",
number = "PART 2",

}

TY - JOUR

T1 - Vacancy-acceptor complexes in germanium produced by ion implantation

AU - Feuser, U.

AU - Vianden, R.

AU - Alves, E.

AU - da Silva, M. F.

AU - Szilágyi, E.

AU - Pászti, F.

AU - Soares, J. C.

PY - 1991/7/1

Y1 - 1991/7/1

N2 - Combining results obtained by the γ-γ perturbed angular correlation method, Rutherford backscattering and elastic recoil detection of hydrogen, a defect complex formed in germanium by indium implantation is identified as a vacancy trapped by the indium probe.

AB - Combining results obtained by the γ-γ perturbed angular correlation method, Rutherford backscattering and elastic recoil detection of hydrogen, a defect complex formed in germanium by indium implantation is identified as a vacancy trapped by the indium probe.

UR - http://www.scopus.com/inward/record.url?scp=34250703464&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=34250703464&partnerID=8YFLogxK

U2 - 10.1016/0168-583X(91)95762-3

DO - 10.1016/0168-583X(91)95762-3

M3 - Article

VL - 59-60

SP - 1049

EP - 1052

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

SN - 0168-583X

IS - PART 2

ER -