UV-laser-induced etching and metal seeding on polymers; a surface characterization

J. Békési, K. Kordás, Cs Beleznai, K. Bali, R. Vajtai, L. Nánai

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

Results of UV (308 nm) laser pulse induced dry etching with subsequent Pd deposition from a PdCl2 solution (acid base with pH = 1) on polyimide surface are reported. The surface roughness has been determined before and after illumination. The fractal-based examination techniques based on the area-perimeter and the structure function methods. It could be concluded that the preetching of the polyimide surface significantly enhances the flux of Pd atoms deposited onto the surface, which is a power function of the number of shots (30 mJ/cm2 at 20 ns pulse duration) with a power coefficient close to 0.5. It has been observed that the seeding process started simultaneously at a number of places resulting in island-like deposits. Fractal characterisation of surfaces resulted in a fractal dimension changing between 2.28 and 2.71 carried out with the methods outlined earlier. It might be concluded that the seeding process occurs at atomic scale, but it exhibits a very strong trend towards the formation of aggregates and/or cluster-type structures.

Original languageEnglish
Pages (from-to)613-616
Number of pages4
JournalApplied Surface Science
Volume138-139
Issue number1-4
Publication statusPublished - Jan 1999

Fingerprint

inoculation
ultraviolet lasers
Etching
Polymers
Metals
etching
fractals
Lasers
polymers
polyimides
Polyimides
Fractals
metals
Dry etching
Fractal dimension
shot
Laser pulses
surface roughness
pulse duration
Deposits

Keywords

  • Excimer lasers
  • Fractal dimension
  • Palladium
  • Polyimide

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Surfaces, Coatings and Films
  • Condensed Matter Physics

Cite this

Békési, J., Kordás, K., Beleznai, C., Bali, K., Vajtai, R., & Nánai, L. (1999). UV-laser-induced etching and metal seeding on polymers; a surface characterization. Applied Surface Science, 138-139(1-4), 613-616.

UV-laser-induced etching and metal seeding on polymers; a surface characterization. / Békési, J.; Kordás, K.; Beleznai, Cs; Bali, K.; Vajtai, R.; Nánai, L.

In: Applied Surface Science, Vol. 138-139, No. 1-4, 01.1999, p. 613-616.

Research output: Contribution to journalArticle

Békési, J, Kordás, K, Beleznai, C, Bali, K, Vajtai, R & Nánai, L 1999, 'UV-laser-induced etching and metal seeding on polymers; a surface characterization', Applied Surface Science, vol. 138-139, no. 1-4, pp. 613-616.
Békési J, Kordás K, Beleznai C, Bali K, Vajtai R, Nánai L. UV-laser-induced etching and metal seeding on polymers; a surface characterization. Applied Surface Science. 1999 Jan;138-139(1-4):613-616.
Békési, J. ; Kordás, K. ; Beleznai, Cs ; Bali, K. ; Vajtai, R. ; Nánai, L. / UV-laser-induced etching and metal seeding on polymers; a surface characterization. In: Applied Surface Science. 1999 ; Vol. 138-139, No. 1-4. pp. 613-616.
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