UV-laser-induced etching and metal seeding on polymers; a surface characterization

J. Békési, K. Kordás, Cs Beleznai, K. Bali, R. Vajtai, L. Nánai

Research output: Contribution to journalArticle

7 Citations (Scopus)


Results of UV (308 nm) laser pulse induced dry etching with subsequent Pd deposition from a PdCl 2 solution (acid base with pH = 1) on polyimide surface are reported. The surface roughness has been determined before and after illumination. The fractal-based examination techniques based on the area-perimeter and the structure function methods. It could be concluded that the preetching of the polyimide surface significantly enhances the flux of Pd atoms deposited onto the surface, which is a power function of the number of shots (30 mJ/cm 2 at 20 ns pulse duration) with a power coefficient close to 0.5. It has been observed that the seeding process started simultaneously at a number of places resulting in island-like deposits. Fractal characterisation of surfaces resulted in a fractal dimension changing between 2.28 and 2.71 carried out with the methods outlined earlier. It might be concluded that the seeding process occurs at atomic scale, but it exhibits a very strong trend towards the formation of aggregates and/or cluster-type structures.

Original languageEnglish
Pages (from-to)613-616
Number of pages4
JournalApplied Surface Science
Issue number1-4
Publication statusPublished - Jan 1999


  • Excimer lasers
  • Fractal dimension
  • Palladium
  • Polyimide

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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