A method is described for the investigation of the distribution of boron atoms implanted in Si by ion bombardment. The method is based on measuring the energy lost by the alpha particles produced in the samples under the influence of a neutron beam. The characteristics of the method are presented and its capabilities are estimated.
|Number of pages||6|
|Journal||Instruments and Experimental Techniques (English Translation of Pribory I Tekhnika Eksperimenta)|
|Publication status||Published - Jan 1 1979|
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