Ultraviolet femtosecond pulses: Key technology for sub-micron machining and efficient XUV pulse generation

P. Simon, J. Bekesi, C. Dölle, J. H. Klein-Wiele, G. Marowsky, S. Szatmari, B. Wellegehausen

Research output: Contribution to journalArticle

8 Citations (Scopus)


A novel method was proposed to increase the energy extraction from excimer amplifiers. Applications on sub-micron machining and experiments to generate powerful XUV radiation were discussed using frequency tripling. It was observed that the output energy from excimer amplifier can be increased up to 100 mJ at 248 nm.

Original languageEnglish
Pages (from-to)S189-S192
JournalApplied Physics B: Lasers and Optics
Issue numberSUPPL.
Publication statusPublished - Jun 1 2002


ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

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