Ultrahard coatings from Ti-BN multilayers and by co-sputtering

T. Friesen, J. Haupt, W. Gissler, A. Barna, P. Barna

Research output: Contribution to journalArticle

40 Citations (Scopus)

Abstract

Two new techniques for the preparation of very hard Ti-B-N coatings are presented. The first method is accomplished in two steps: (i) the deposition of a multilayer coating of the sequence Ti-BN by reactive or non-reactive sputtering from a titanium and a hexagonal BN target respectively; (ii) a subsequent thermal treatment of the multilayer to induce a diffusion-activated mixing process between the titanium and BN layers with consequent phase transformations. The coatings were characterized with respect to stoichiometry by X-ray photoelectron spectroscopy with respect to structure by glancing angle X-ray diffractometry and with respect to hardness and residual stress by micro-indentation and the substrate-bending method respectively. Hardness values up to 6000 HV were observed at a concentration ratio [Ti]:[B]:[N] = 1:0.5:0.4. The coting with this compositional ratio is assumed to comprise a mixture of two solid solutions of the type Ti(Bx,Nx) and TiN1-x(By. Thsi new technique has the advantage that almost stress-free coatings with good adhesion to metallic and non-metallic substrates are obtained. The second method is a co-sputtering process from a titanium and BN target. With this method coatings of considerable compressive stress are obtained.

Original languageEnglish
Pages (from-to)169-174
Number of pages6
JournalSurface and Coatings Technology
Volume48
Issue number2
DOIs
Publication statusPublished - Nov 1 1991

Fingerprint

Sputtering
Multilayers
sputtering
coatings
Coatings
Titanium
titanium
hardness
Hardness
Substrates
indentation
Compressive stress
Indentation
Stoichiometry
X ray diffraction analysis
residual stress
phase transformations
stoichiometry
Solid solutions
Residual stresses

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Ultrahard coatings from Ti-BN multilayers and by co-sputtering. / Friesen, T.; Haupt, J.; Gissler, W.; Barna, A.; Barna, P.

In: Surface and Coatings Technology, Vol. 48, No. 2, 01.11.1991, p. 169-174.

Research output: Contribution to journalArticle

Friesen, T. ; Haupt, J. ; Gissler, W. ; Barna, A. ; Barna, P. / Ultrahard coatings from Ti-BN multilayers and by co-sputtering. In: Surface and Coatings Technology. 1991 ; Vol. 48, No. 2. pp. 169-174.
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