Tunneling induced decomposition of Mo(CO) 6 onto TiO 2(110) surface

Z. Majzik, N. Balázs, L. Robin, M. Petukhov, B. Domenichini, S. Bourgeois, A. Berkó

Research output: Contribution to journalArticle

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Abstract

Tunneling induced decomposition of Mo(CO) 6 from the gas phase was studied on TiO 2(110) surface by scanning tunneling microscopy (STM) and spectroscopy (STS). The efficiency of the procedure was followed by measuring the dot volume as a proportional indicator of the amount of the decomposed precursor. It was found that below 1 × 10 -5 Pa background pressure of Mo(CO) 6, there is no measurable effect and above 1 × 10 -4 Pa, the nanodot size is too large compared to the curvature of the tip (20-40 nm). A threshold bias of +3.1(±0.1) V on the sample was measured for the decomposition of Mo(CO) 6 in gas ambient. In the absence of the precursor, dot formation was observed only above +3.7(±0.2) V, in good agreement with the results reported in our earlier work about nanolithography on clean TiO 2(110) substrate (E. Kriván, A. Berkó: J. Vac. Sci. & Tech. B 15(1) (1997)25). By applying voltages in the range of 3.1-3.5 V, a systematic enlargement of the created nanodots was found in the range of 2-20 s of duration and 0.01-1.0 nA of tunneling current. The I-V curves detected on the top of the nanodots have shown that the created features are of insulator character. This observation indicates that the decomposition of Mo(CO) 6 is also accompanied by oxidation of the deposited Mo species.

Original languageEnglish
Pages (from-to)623-626
Number of pages4
JournalVacuum
Volume86
Issue number6
DOIs
Publication statusPublished - Jan 27 2012

Fingerprint

Decomposition
decomposition
Nanolithography
Gases
Scanning tunneling microscopy
scanning tunneling microscopy
curvature
insulators
Spectroscopy
vapor phases
Oxidation
oxidation
thresholds
Electric potential
electric potential
Substrates
curves
gases
spectroscopy
hexacarbonylmolybdenum

Keywords

  • Nanoscale lithography
  • Scanning tunneling microscopy and spectroscopy
  • Tunneling current induced local decomposition of Mo(CO)

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Instrumentation
  • Surfaces, Coatings and Films

Cite this

Majzik, Z., Balázs, N., Robin, L., Petukhov, M., Domenichini, B., Bourgeois, S., & Berkó, A. (2012). Tunneling induced decomposition of Mo(CO) 6 onto TiO 2(110) surface. Vacuum, 86(6), 623-626. https://doi.org/10.1016/j.vacuum.2011.08.009

Tunneling induced decomposition of Mo(CO) 6 onto TiO 2(110) surface. / Majzik, Z.; Balázs, N.; Robin, L.; Petukhov, M.; Domenichini, B.; Bourgeois, S.; Berkó, A.

In: Vacuum, Vol. 86, No. 6, 27.01.2012, p. 623-626.

Research output: Contribution to journalArticle

Majzik, Z, Balázs, N, Robin, L, Petukhov, M, Domenichini, B, Bourgeois, S & Berkó, A 2012, 'Tunneling induced decomposition of Mo(CO) 6 onto TiO 2(110) surface', Vacuum, vol. 86, no. 6, pp. 623-626. https://doi.org/10.1016/j.vacuum.2011.08.009
Majzik Z, Balázs N, Robin L, Petukhov M, Domenichini B, Bourgeois S et al. Tunneling induced decomposition of Mo(CO) 6 onto TiO 2(110) surface. Vacuum. 2012 Jan 27;86(6):623-626. https://doi.org/10.1016/j.vacuum.2011.08.009
Majzik, Z. ; Balázs, N. ; Robin, L. ; Petukhov, M. ; Domenichini, B. ; Bourgeois, S. ; Berkó, A. / Tunneling induced decomposition of Mo(CO) 6 onto TiO 2(110) surface. In: Vacuum. 2012 ; Vol. 86, No. 6. pp. 623-626.
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