Tungsten oxide nanoparticles synthesised by laser assisted homogeneous gas-phase nucleation

O. Alm, L. Landström, M. Boman, C. G. Granqvist, P. Heszler

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

Tungsten oxide nanoparticles were generated by excimer (ArF) laser assisted chemical vapor deposition from WF6/H2/O2/Ar gas mixtures. The deposited particles were characterized by X-ray diffraction, X-ray photoelectron spectroscopy, and transmission electron microscopy. The deposition rate as a function of the partial pressures of the reactants and of the laser fluence was measured by X-ray fluorescence spectroscopy. The mean diameter of the deposited tungsten oxide particles varied with the experimental parameters and was typically 23 nm. Particles with a higher degree of crystallinity were observed at a laser fluence exceeding 130 mJ/cm2, and X-ray amorphous particles were obtained below 110 mJ/cm2. The amorphous tungsten oxide had a stoichiometry ranging from WO2.7 to WO3. Deposits were formed only when hydrogen was present in the gas mixture.

Original languageEnglish
Pages (from-to)262-267
Number of pages6
JournalApplied Surface Science
Volume247
Issue number1-4
DOIs
Publication statusPublished - Jul 15 2005

Fingerprint

tungsten oxides
Tungsten
Nucleation
Gases
nucleation
vapor phases
Nanoparticles
Gas mixtures
nanoparticles
Oxides
Lasers
lasers
gas mixtures
fluence
x rays
Excimer lasers
Deposition rates
Stoichiometry
Partial pressure
Hydrogen

Keywords

  • LCVD
  • Nanostructured materials
  • Tungsten oxide

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Surfaces, Coatings and Films
  • Condensed Matter Physics

Cite this

Tungsten oxide nanoparticles synthesised by laser assisted homogeneous gas-phase nucleation. / Alm, O.; Landström, L.; Boman, M.; Granqvist, C. G.; Heszler, P.

In: Applied Surface Science, Vol. 247, No. 1-4, 15.07.2005, p. 262-267.

Research output: Contribution to journalArticle

Alm, O. ; Landström, L. ; Boman, M. ; Granqvist, C. G. ; Heszler, P. / Tungsten oxide nanoparticles synthesised by laser assisted homogeneous gas-phase nucleation. In: Applied Surface Science. 2005 ; Vol. 247, No. 1-4. pp. 262-267.
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