Tungsten oxide nanoparticles synthesised by laser assisted homogeneous gas-phase nucleation

O. Alm, L. Landström, M. Boman, C. G. Granqvist, P. Heszler

Research output: Contribution to journalConference article

8 Citations (Scopus)


Tungsten oxide nanoparticles were generated by excimer (ArF) laser assisted chemical vapor deposition from WF 6 /H 2 /O 2 /Ar gas mixtures. The deposited particles were characterized by X-ray diffraction, X-ray photoelectron spectroscopy, and transmission electron microscopy. The deposition rate as a function of the partial pressures of the reactants and of the laser fluence was measured by X-ray fluorescence spectroscopy. The mean diameter of the deposited tungsten oxide particles varied with the experimental parameters and was typically 23 nm. Particles with a higher degree of crystallinity were observed at a laser fluence exceeding 130 mJ/cm 2 , and X-ray amorphous particles were obtained below 110 mJ/cm 2 . The amorphous tungsten oxide had a stoichiometry ranging from WO 2.7 to WO 3 . Deposits were formed only when hydrogen was present in the gas mixture.

Original languageEnglish
Pages (from-to)262-267
Number of pages6
JournalApplied Surface Science
Issue number1-4
Publication statusPublished - Jul 15 2005
EventProceedings of the European Materials Research Society 2004 - Symposium N EMRS-2004 -
Duration: May 24 2004May 28 2004



  • LCVD
  • Nanostructured materials
  • Tungsten oxide

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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