Transmission electron microscopy characterization of hard coatings and films: Sample preparation aspects and results

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26 Citations (Scopus)

Abstract

The theory of surface morphology development during small-angle ion milling of samples for transmission electron microscopy is discussed from the point of view of preparing samples of a hard material in contact with a softer material. The basic points of the mechanical preparation and the ion-milling arrangement are also listed. Samples of hard films on substrates (diamond/Si, SiC/Si and TiN/Si) as well as a fiber composite (SiC in plastic) and mechanically alloyed powders are shown to illustrate the power of the technique.

Original languageEnglish
Pages (from-to)89-95
Number of pages7
JournalSurface and Coatings Technology
Volume80
Issue number1-2
DOIs
Publication statusPublished - Mar 1996

Fingerprint

Hard coatings
Ions
Transmission electron microscopy
coatings
preparation
transmission electron microscopy
Diamond
Powders
Surface morphology
Diamonds
fiber composites
Plastics
Fibers
Composite materials
ions
Substrates
plastics
diamonds

Keywords

  • Diamond
  • Electron microscopy
  • Hard coatings
  • Ion milling
  • Thin films

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

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AU - Radnóczi, G.

AU - Barna, A.

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AB - The theory of surface morphology development during small-angle ion milling of samples for transmission electron microscopy is discussed from the point of view of preparing samples of a hard material in contact with a softer material. The basic points of the mechanical preparation and the ion-milling arrangement are also listed. Samples of hard films on substrates (diamond/Si, SiC/Si and TiN/Si) as well as a fiber composite (SiC in plastic) and mechanically alloyed powders are shown to illustrate the power of the technique.

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KW - Electron microscopy

KW - Hard coatings

KW - Ion milling

KW - Thin films

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