The paper will present the methodology and the results of measuring and simulating the thermal transient behaviour of micro hotplates. The investigated devices were designed for integrated gas sensors of calorimetric operation principle, e.g. micro-pellistors, heat conductivity type sensors or mass flow meters. They consist of a platinum heater filament embedded in silicon-nitride membranes that can be used both for heating and temperature sensing.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Hardware and Architecture
- Electrical and Electronic Engineering