Reflectivity, transmission and scattering measurments in ArF (193 nm) excimer-laser irradiated polyimide are reported. The time dependence of transient changes in all three quantities were measured together for the first time, confirming a transient refractive-index change in the first 150 ns after irradiation. The relaxation time of the effect was measured and found to consist of both a fast and slow component similar to that previously reported in acoustic wave measurements. The fast decay in about 60 ns and the slow decay is 115 ns. Several potential mechanisms are examined which may explain the result.
ASJC Scopus subject areas
- Materials Science(all)