Topology analysis of scanning microscope images with structural entropy and discrete wavelet transform

Szilvia Nagy, András Fehér

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Topology free structure of scanning electron microscopy images of heat treated, metallized compound semiconductor surfaces are studied using structural entropy based analysis. The scale dependence and the possible superstructures are determined by wavelet transforming the images before the localization type detection. The studied images are taken in-situ during a thermalization experiment, using GaAs as a substrate and gold, zinc and SiO2 layers of 60 to 100 nm thickness.

Original languageEnglish
Title of host publication2011 18th International Conference on Systems, Signals and Image Processing, Proceedings IWSSIP 2011
Pages101-104
Number of pages4
Publication statusPublished - Nov 2 2011
Event2011 18th International Conference on Systems, Signals and Image Processing, IWSSIP 2011 - Sarajevo, Bosnia and Herzegovina
Duration: Jun 16 2011Jun 18 2011

Publication series

NameInternational Conference on Systems, Signals, and Image Processing
ISSN (Print)2157-8672
ISSN (Electronic)2157-8702

Other

Other2011 18th International Conference on Systems, Signals and Image Processing, IWSSIP 2011
CountryBosnia and Herzegovina
CitySarajevo
Period6/16/116/18/11

ASJC Scopus subject areas

  • Artificial Intelligence
  • Computer Networks and Communications
  • Signal Processing
  • Software

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  • Cite this

    Nagy, S., & Fehér, A. (2011). Topology analysis of scanning microscope images with structural entropy and discrete wavelet transform. In 2011 18th International Conference on Systems, Signals and Image Processing, Proceedings IWSSIP 2011 (pp. 101-104). [5977396] (International Conference on Systems, Signals, and Image Processing).