The topography of resistive Ga2O3 metal oxide sensing devices was examined and characterized with an atomic force microscope (AFM). The sensing devices do not have to be destroyed for characterization and stay fully functional. Deposition of nobel metal dispersions, for example, palladium (Pd), onto the sensor surface improves its properties by adding catalytic activity. The distribution of the Pd clusters was investigated.
- gas‐sensing device
- noble metal dispersion
- supported catalyst
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics