Topography and performance of gas‐sensing devices: An AFM study

Birgitta Hacker, Maximilian Fleischer, Hans Meixner

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

The topography of resistive Ga2O3 metal oxide sensing devices was examined and characterized with an atomic force microscope (AFM). The sensing devices do not have to be destroyed for characterization and stay fully functional. Deposition of nobel metal dispersions, for example, palladium (Pd), onto the sensor surface improves its properties by adding catalytic activity. The distribution of the Pd clusters was investigated.

Original languageEnglish
Pages (from-to)291-294
Number of pages4
JournalScanning
Volume15
Issue number5
DOIs
Publication statusPublished - 1993

Keywords

  • AFM
  • gas‐sensing device
  • noble metal dispersion
  • supported catalyst

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Instrumentation

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