TiN in work function type sensors: a stable ammonia sensitive material for room temperature operation with low humidity cross sensitivity

Bernhard Ostrick, Roland Pohle, Maximilian Fleischer, H. Meixner

Research output: Contribution to journalArticle

23 Citations (Scopus)

Abstract

In this work, it was found that exposure of TiN to ammonia (400 ppb-100 ppm) in wet synthetic air at room temperature leads to a reversible decrease of ΔΦ. There is a change of the work function of -30 meV/decade of increasing ammonia concentration at room temperature. The response time (t90) to 1 ppm is ≤ 1 min. The sensitivity is a typical room temperature effect as it decreases at higher temperatures up to 100°C. The reaction has a low cross sensitivity to humidity, as - first - the sensitivity to ammonia does not depend on the relative humidity and - second - the work function change due to humidity changes is as low as -2 meV for an increase of 10% in relative humidity. The Diffuse Reflectance Infrared Fourier Transform Spectra (DRIFT-spectra) indicate that the adsorption of ammonia is correlated with a decrease of OH species on the surface. All data are compared to the gas reactions of TiO2.

Original languageEnglish
Pages (from-to)234-239
Number of pages6
JournalSensors and Actuators, B: Chemical
Volume68
Issue number1
DOIs
Publication statusPublished - Aug 25 2000

Fingerprint

Ammonia
humidity
ammonia
Atmospheric humidity
sensitivity
sensors
Sensors
room temperature
Temperature
Thermal effects
temperature effects
Fourier transforms
Gases
Infrared radiation
reflectance
Adsorption
adsorption
air
Air
gases

ASJC Scopus subject areas

  • Analytical Chemistry
  • Electrochemistry
  • Electrical and Electronic Engineering

Cite this

TiN in work function type sensors : a stable ammonia sensitive material for room temperature operation with low humidity cross sensitivity. / Ostrick, Bernhard; Pohle, Roland; Fleischer, Maximilian; Meixner, H.

In: Sensors and Actuators, B: Chemical, Vol. 68, No. 1, 25.08.2000, p. 234-239.

Research output: Contribution to journalArticle

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