THz detection by modified thermopile

Béla Szentpáli, Gábor Matyi, P. Fürjes, Endre László, G. Battistig, I. Bársony, Gergely Károlyi, Tibor Berceli

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The modified micromachined thermopile consists of linearly arranged thermopairs instead of the usual loops. This device can act as a series of antennas and senses the millimeter wave radiation [1]. The antenna-like operation was demonstrated by the strong dependence on the polarization. The working principle is similar to the bolometers in that respect that the absorbed radiation heats up the semiconductor strips, but the temperature increment is sensed by the Seebeck effect instead of the resistance increment. Therefore there is no read-out current and the voltage output starts from zero. In the present work we are going to search absorption spectra of the device. It is shown that the resonance depends mainly on the dimensions and shape of the chip; the linear thermopiles are rather E-field probes. The fabrication of the device will be also outlined as well as the experimental results.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Volume8066
DOIs
Publication statusPublished - 2011
EventSmart Sensors, Actuators, and MEMS V - Prague, Czech Republic
Duration: Apr 18 2011Apr 20 2011

Other

OtherSmart Sensors, Actuators, and MEMS V
CountryCzech Republic
CityPrague
Period4/18/114/20/11

Fingerprint

Thermopiles
thermopiles
Seebeck effect
Antennas
Bolometers
Increment
Antenna
Heat radiation
antennas
Radiation
Millimeter waves
Bolometer
Absorption spectra
Millimeter Wave
Absorption Spectra
bolometers
Polarization
Semiconductor materials
Fabrication
millimeter waves

Keywords

  • MEMS
  • Millimeter/submillimeter waves
  • Thermopiles

ASJC Scopus subject areas

  • Applied Mathematics
  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Szentpáli, B., Matyi, G., Fürjes, P., László, E., Battistig, G., Bársony, I., ... Berceli, T. (2011). THz detection by modified thermopile. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 8066). [80661R] https://doi.org/10.1117/12.886707

THz detection by modified thermopile. / Szentpáli, Béla; Matyi, Gábor; Fürjes, P.; László, Endre; Battistig, G.; Bársony, I.; Károlyi, Gergely; Berceli, Tibor.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 8066 2011. 80661R.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Szentpáli, B, Matyi, G, Fürjes, P, László, E, Battistig, G, Bársony, I, Károlyi, G & Berceli, T 2011, THz detection by modified thermopile. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 8066, 80661R, Smart Sensors, Actuators, and MEMS V, Prague, Czech Republic, 4/18/11. https://doi.org/10.1117/12.886707
Szentpáli B, Matyi G, Fürjes P, László E, Battistig G, Bársony I et al. THz detection by modified thermopile. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 8066. 2011. 80661R https://doi.org/10.1117/12.886707
Szentpáli, Béla ; Matyi, Gábor ; Fürjes, P. ; László, Endre ; Battistig, G. ; Bársony, I. ; Károlyi, Gergely ; Berceli, Tibor. / THz detection by modified thermopile. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 8066 2011.
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