Three-dimensionally embedded indium tin oxide (ITO) films in photosensitive glass: A transparent and conductive platform for microdevices

S. Beke, L. Kõrösi, K. Sugioka, K. Midorikawa, I. Dékány

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

A new method for embedding transparent and conductive two- and three-dimensional microstructures in glass is presented. We show that the internal surface of hollow structures fabricated by femtosecond-laser direct writing inside the photosensitive glass can be coated by indium tin oxide (Sn-doped In2O3, ITO) using a sol-gel process. The idea of combining two transparent materials with different electrical properties, i.e., insulating and conductive, is very promising and hence it opens new prospects in manufacturing cutting edge microdevices, such as lab-on-a-chips (LOCs) and microelectromechanical systems (MEMS).

Original languageEnglish
Pages (from-to)265-269
Number of pages5
JournalApplied Physics A: Materials Science and Processing
Volume102
Issue number2
DOIs
Publication statusPublished - Feb 2011

Fingerprint

Photosensitive glass
Tin oxides
indium oxides
Indium
tin oxides
Oxide films
oxide films
platforms
Lab-on-a-chip
transparence
glass
sol-gel processes
Ultrashort pulses
embedding
Sol-gel process
microelectromechanical systems
MEMS
hollow
Electric properties
manufacturing

ASJC Scopus subject areas

  • Materials Science(all)
  • Chemistry(all)

Cite this

@article{3bab9afb543f4fa3bcc460bc7d7b5b91,
title = "Three-dimensionally embedded indium tin oxide (ITO) films in photosensitive glass: A transparent and conductive platform for microdevices",
abstract = "A new method for embedding transparent and conductive two- and three-dimensional microstructures in glass is presented. We show that the internal surface of hollow structures fabricated by femtosecond-laser direct writing inside the photosensitive glass can be coated by indium tin oxide (Sn-doped In2O3, ITO) using a sol-gel process. The idea of combining two transparent materials with different electrical properties, i.e., insulating and conductive, is very promising and hence it opens new prospects in manufacturing cutting edge microdevices, such as lab-on-a-chips (LOCs) and microelectromechanical systems (MEMS).",
author = "S. Beke and L. K{\~o}r{\"o}si and K. Sugioka and K. Midorikawa and I. D{\'e}k{\'a}ny",
year = "2011",
month = "2",
doi = "10.1007/s00339-010-6173-3",
language = "English",
volume = "102",
pages = "265--269",
journal = "Applied Physics",
issn = "0340-3793",
publisher = "Springer Verlag",
number = "2",

}

TY - JOUR

T1 - Three-dimensionally embedded indium tin oxide (ITO) films in photosensitive glass

T2 - A transparent and conductive platform for microdevices

AU - Beke, S.

AU - Kõrösi, L.

AU - Sugioka, K.

AU - Midorikawa, K.

AU - Dékány, I.

PY - 2011/2

Y1 - 2011/2

N2 - A new method for embedding transparent and conductive two- and three-dimensional microstructures in glass is presented. We show that the internal surface of hollow structures fabricated by femtosecond-laser direct writing inside the photosensitive glass can be coated by indium tin oxide (Sn-doped In2O3, ITO) using a sol-gel process. The idea of combining two transparent materials with different electrical properties, i.e., insulating and conductive, is very promising and hence it opens new prospects in manufacturing cutting edge microdevices, such as lab-on-a-chips (LOCs) and microelectromechanical systems (MEMS).

AB - A new method for embedding transparent and conductive two- and three-dimensional microstructures in glass is presented. We show that the internal surface of hollow structures fabricated by femtosecond-laser direct writing inside the photosensitive glass can be coated by indium tin oxide (Sn-doped In2O3, ITO) using a sol-gel process. The idea of combining two transparent materials with different electrical properties, i.e., insulating and conductive, is very promising and hence it opens new prospects in manufacturing cutting edge microdevices, such as lab-on-a-chips (LOCs) and microelectromechanical systems (MEMS).

UR - http://www.scopus.com/inward/record.url?scp=79651468916&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=79651468916&partnerID=8YFLogxK

U2 - 10.1007/s00339-010-6173-3

DO - 10.1007/s00339-010-6173-3

M3 - Article

AN - SCOPUS:79651468916

VL - 102

SP - 265

EP - 269

JO - Applied Physics

JF - Applied Physics

SN - 0340-3793

IS - 2

ER -