Three-dimensional view of the shape, size, and atomic composition of ordered nanostructures by Rutherford backscattering spectrometry

Z. Zolnai, N. Nagy, A. Deák, G. Battistig, E. Kótai

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

Conventional Rutherford backscattering spectrometry (RBS) in combination with Monte Carlo simulations performed on 3D model cells allow the self-consistent determination of the shape, size, and atomic composition of silica particles as model structures, on the submicron scale. Spherical and ellipsoidal particle shapes and the spatial distribution of implanted Ar and Xe in the particles and in the unmasked zones of the underlying substrate is investigated. We demonstrate that both lateral and depth information for ordered nano-objects can be derived from multiple RBS spectrum analysis.

Original languageEnglish
Article number233302
JournalPhysical Review B - Condensed Matter and Materials Physics
Volume83
Issue number23
DOIs
Publication statusPublished - Jun 20 2011

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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