Three dimensional single crystalline force sensor by porous Si micromachining

Research output: Chapter in Book/Report/Conference proceedingConference contribution

8 Citations (Scopus)

Abstract

Porous Si micromachining technique was used for the formation of single crystalline force sensor elements capable to resolve the three vectorial components of the load. Similar structures presented so far, are formed from deposited polycrystalline Si resistors embedded in multilayered SiO 2/Si3N4 membranes, using surface micromachining technique for cavity formation1. In the present work, in the n-type perforated membrane four implanted piezoresistors were fabricated with their reference pairs on the substrate, in order to form 4 half-bridges for the transduction of the mechanical stress. The HF based porous Si process was successfully combined with conventional doping and Al metallization, thereby offering a possible integration of read-out and amplifying electronics. The 300×300μm2 membrane size allows the formation of large area arrays for tactile sensing using single crystalline sensing elements of superior mechanical properties.

Original languageEnglish
Title of host publicationProceedings of IEEE Sensors
EditorsD. Rocha, P.M. Sarro, M.J. Vellekoop
Pages501-504
Number of pages4
Volume1
Publication statusPublished - 2004
EventIEEE Sensors 2004 - Vienna, Austria
Duration: Oct 24 2004Oct 27 2004

Other

OtherIEEE Sensors 2004
CountryAustria
CityVienna
Period10/24/0410/27/04

Fingerprint

Micromachining
Crystalline materials
Membranes
Sensors
Surface micromachining
Metallizing
Resistors
Electronic equipment
Doping (additives)
Mechanical properties
Substrates

Keywords

  • 3D force sensor
  • Porous Si micromachining
  • Tactile sensing

ASJC Scopus subject areas

  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

Cite this

Ádám, M., Vázsonyi, E., Bársony, I., Vésárhelyi, G., & Dücső, C. (2004). Three dimensional single crystalline force sensor by porous Si micromachining. In D. Rocha, P. M. Sarro, & M. J. Vellekoop (Eds.), Proceedings of IEEE Sensors (Vol. 1, pp. 501-504). [M4P-P.1]

Three dimensional single crystalline force sensor by porous Si micromachining. / Ádám, M.; Vázsonyi, E.; Bársony, I.; Vésárhelyi, G.; Dücső, C.

Proceedings of IEEE Sensors. ed. / D. Rocha; P.M. Sarro; M.J. Vellekoop. Vol. 1 2004. p. 501-504 M4P-P.1.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ádám, M, Vázsonyi, E, Bársony, I, Vésárhelyi, G & Dücső, C 2004, Three dimensional single crystalline force sensor by porous Si micromachining. in D Rocha, PM Sarro & MJ Vellekoop (eds), Proceedings of IEEE Sensors. vol. 1, M4P-P.1, pp. 501-504, IEEE Sensors 2004, Vienna, Austria, 10/24/04.
Ádám M, Vázsonyi E, Bársony I, Vésárhelyi G, Dücső C. Three dimensional single crystalline force sensor by porous Si micromachining. In Rocha D, Sarro PM, Vellekoop MJ, editors, Proceedings of IEEE Sensors. Vol. 1. 2004. p. 501-504. M4P-P.1
Ádám, M. ; Vázsonyi, E. ; Bársony, I. ; Vésárhelyi, G. ; Dücső, C. / Three dimensional single crystalline force sensor by porous Si micromachining. Proceedings of IEEE Sensors. editor / D. Rocha ; P.M. Sarro ; M.J. Vellekoop. Vol. 1 2004. pp. 501-504
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