Thin- and thick-film structures for miniature biomedical sensors

M. R. Neuman, E. Lindner, A. Cristalli, R. Gyurcsányi, K. Cheema, M. Pandolf

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Physical and chemical miniature biomedical sensors can be fabricated using thin-and thick-film technology. Devices such as biopotential electrodes; temperature, force, and compliant strain gauge sensors; and ion-selective electrodes have been designed, constructed, and applied to biomedical problems. Some times there are advantages to depositing non-conventional materials, thicker films, and thinthick-film hybrid structures in fabricating biomedical sensors.

Original languageEnglish
Title of host publication1st Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages211-215
Number of pages5
ISBN (Print)0780366034, 9780780366039
DOIs
Publication statusPublished - 2000
Event1st Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology, MMB 2000 - Lyon, France
Duration: Oct 12 2000Oct 14 2000

Other

Other1st Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology, MMB 2000
CountryFrance
CityLyon
Period10/12/0010/14/00

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ASJC Scopus subject areas

  • Engineering(all)

Cite this

Neuman, M. R., Lindner, E., Cristalli, A., Gyurcsányi, R., Cheema, K., & Pandolf, M. (2000). Thin- and thick-film structures for miniature biomedical sensors. In 1st Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings (pp. 211-215). [893774] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MMB.2000.893774