Thickness dependent migration of Au films

G. Pető, T. Lohner, L. Pogány, T. Andersson

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

The influence of the annealing of a AuSiO2Si layer with different thickness of Au is investigated by Rutherford Backscattering and Scanning Electron Microscopy. The heat treatment induces gold migration which strongly depends on the thickness of Au. There is a lack of this migration at 25 nm region of Au.

Original languageEnglish
Pages (from-to)1128-1131
Number of pages4
JournalVacuum
Volume41
Issue number4-6
DOIs
Publication statusPublished - 1990

Fingerprint

Rutherford backscattering spectroscopy
Gold
Heat treatment
Annealing
Scanning electron microscopy
backscattering
heat treatment
gold
scanning electron microscopy
annealing

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Thickness dependent migration of Au films. / Pető, G.; Lohner, T.; Pogány, L.; Andersson, T.

In: Vacuum, Vol. 41, No. 4-6, 1990, p. 1128-1131.

Research output: Contribution to journalArticle

Pető, G. ; Lohner, T. ; Pogány, L. ; Andersson, T. / Thickness dependent migration of Au films. In: Vacuum. 1990 ; Vol. 41, No. 4-6. pp. 1128-1131.
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