Thickness dependent migration of Au films

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Abstract

The influence of the annealing of a AuSiO2Si layer with different thickness of Au is investigated by Rutherford Backscattering and Scanning Electron Microscopy. The heat treatment induces gold migration which strongly depends on the thickness of Au. There is a lack of this migration at 25 nm region of Au.

Original languageEnglish
Pages (from-to)1128-1131
Number of pages4
JournalVacuum
Volume41
Issue number4-6
DOIs
Publication statusPublished - 1990

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ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

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