Thickness and annealing dependent morphology changes of iron silicide nanostructures on Si(001)

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Self-assembled, strain-induced iron silicide nanostructures are grown on Si(001) substrate by conventional Fe evaporation and subsequent annealing. The phases and structures are characterized by reflection high energy electron diffraction, scanning electron microscopy and electrical measurements. The size distribution of the formed iron silicide nanoobjects is inhomogeneous, but they are oriented in perpendicular directions on Si(001). The shape of the nanostructures varies from rod like to faceted triangular and quadratic depending on the initial Fe thickness and on the annealing temperature.

Original languageEnglish
Pages (from-to)1366-1369
Number of pages4
JournalPhysica Status Solidi (C) Current Topics in Solid State Physics
Issue number6
Publication statusPublished - Jun 1 2012



  • Iron silicide
  • Nanostructures
  • Self-assembly

ASJC Scopus subject areas

  • Condensed Matter Physics

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