Self-assembled, strain-induced iron silicide nanostructures are grown on Si(001) substrate by conventional Fe evaporation and subsequent annealing. The phases and structures are characterized by reflection high energy electron diffraction, scanning electron microscopy and electrical measurements. The size distribution of the formed iron silicide nanoobjects is inhomogeneous, but they are oriented in perpendicular directions on Si(001). The shape of the nanostructures varies from rod like to faceted triangular and quadratic depending on the initial Fe thickness and on the annealing temperature.
|Number of pages||4|
|Journal||Physica Status Solidi (C) Current Topics in Solid State Physics|
|Publication status||Published - Jun 1 2012|
- Iron silicide
ASJC Scopus subject areas
- Condensed Matter Physics