Gas sensors form a significant group of thick-layer sensors produced with very efficient methods in several variations. Their operation is based on the effect of the electron transition between the oxide having semiconductive properties and the adsorbing gas on the resistance of the oxide. The thick-layer humidity sensors contain pory dielectrics; the capacity of the condensers designed from them, or their impedance show a well measurable change depending on the relative humidity. The sensor types worked out at the Microelectronics Enterprise demonstrate adequate sensitivity and quickness.
|Translated title of the contribution||Thick-layer Technology for Gas Sensors.|
|Number of pages||4|
|Journal||Meres es Automatika|
|Publication status||Published - Dec 1 1984|
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