Thermal simulation of UV laser ablation of polyimide

Péter Gordon, Bálint Balogh, Bálint Sinkovics

Research output: Contribution to journalArticle

22 Citations (Scopus)

Abstract

The aim of our research is to provide a simulation tool for manufacturing processes that takes the influence of temperature distribution thus the underlying copper pattern and pulse repetition frequency into account. To establish such simulation software, a finite element model was set up which is able to describe the thermal processes and ablation induced by laser irradiation of polymers. The etch rate description usually applied for excimer lasers was slightly altered to be adequate for Gaussian lasers by writing pulse energy instead of fluence. This theoretical consideration was proved by experiments. The experiments also revealed the temperature dependence of etch rate and the influence of pulse repetition frequency on the amount of ablated material. The experimental, analytical and simulation results are in good agreement.

Original languageEnglish
Pages (from-to)347-353
Number of pages7
JournalMicroelectronics Reliability
Volume47
Issue number2-3
DOIs
Publication statusPublished - Feb 1 2007

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Safety, Risk, Reliability and Quality
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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