Thermal mapping with liquid crystal method

A. Csendes, V. Székely, M. Rencz

Research output: Contribution to journalArticle

35 Citations (Scopus)


Good resolution thermal mapping can be achieved by using liquid crystals. The article presents a new, high resolution automated measuring equipment, which executes the measurement and the evaluation process under computer control. The equipment was developed especially for micro-thermography of integrated circuits. The paper presents the practical aspects of the liquid crystal measuring method. Resolution and accuracy features of the method are also discussed.

Original languageEnglish
Pages (from-to)281-290
Number of pages10
JournalMicroelectronic Engineering
Issue number1-4
Publication statusPublished - Feb 1996

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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