Thermal investigation of monolithic structures

Zs Kohári, A. Csendes, V. Székely, M. Rencz

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

In this paper a comparison of a thermal investigation of typical IC structures and a microstructure sample using different methods will be presented. Different simulation methods and, for the IC structure, liquid crystal measurements are compared. The results show that for the investigated structures there are possibilities other than using robust and resource consuming FEM tools.

Original languageEnglish
Pages (from-to)317-325
Number of pages9
JournalMicroelectronics Journal
Volume28
Issue number3
Publication statusPublished - Mar 1997

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Liquid Crystals
Liquid crystals
resources
liquid crystals
Finite element method
microstructure
Microstructure
simulation
Hot Temperature

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

Cite this

Thermal investigation of monolithic structures. / Kohári, Zs; Csendes, A.; Székely, V.; Rencz, M.

In: Microelectronics Journal, Vol. 28, No. 3, 03.1997, p. 317-325.

Research output: Contribution to journalArticle

Kohári, Z, Csendes, A, Székely, V & Rencz, M 1997, 'Thermal investigation of monolithic structures', Microelectronics Journal, vol. 28, no. 3, pp. 317-325.
Kohári, Zs ; Csendes, A. ; Székely, V. ; Rencz, M. / Thermal investigation of monolithic structures. In: Microelectronics Journal. 1997 ; Vol. 28, No. 3. pp. 317-325.
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