Thermal investigation of monolithic structures

Zs Kohári, A. Csendes, V. Székely, M. Rencz

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

In this paper a comparison of a thermal investigation of typical IC structures and a microstructure sample using different methods will be presented. Different simulation methods and, for the IC structure, liquid crystal measurements are compared. The results show that for the investigated structures there are possibilities other than using robust and resource consuming FEM tools.

Original languageEnglish
Pages (from-to)317-325
Number of pages9
JournalMicroelectronics Journal
Volume28
Issue number3
DOIs
Publication statusPublished - Mar 1997

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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