Thermal decomposition of InP surfaces: Volatile component loss, morphological changes, and pattern formation

F. Riesz, L. Dobos, C. Vignali, C. Pelosi

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

The thermal decomposition of bulk and heteroepitaxial InP surfaces is studied by in-situ scanning electron microscopy combined with mass spectrometry and atomic force microscopy. Correlation is established between the evaporation of phosphorous and the formation of thermal etch pits. The formation of the pattern that the In droplets constitute is analysed using fractal mathematics. Only negligible roughening is induced by annealing outside the pits.

Original languageEnglish
Pages (from-to)54-59
Number of pages6
JournalMaterials Science and Engineering B
Volume80
Issue number1-3
DOIs
Publication statusPublished - Mar 22 2001

Fingerprint

Fractals
thermal decomposition
Mass spectrometry
Atomic force microscopy
Evaporation
Pyrolysis
Annealing
Scanning electron microscopy
mathematics
fractals
mass spectroscopy
evaporation
atomic force microscopy
scanning electron microscopy
annealing
Hot Temperature

Keywords

  • InP
  • Pattern formation
  • Thermal decomposition

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Materials Science(all)
  • Condensed Matter Physics

Cite this

Thermal decomposition of InP surfaces : Volatile component loss, morphological changes, and pattern formation. / Riesz, F.; Dobos, L.; Vignali, C.; Pelosi, C.

In: Materials Science and Engineering B, Vol. 80, No. 1-3, 22.03.2001, p. 54-59.

Research output: Contribution to journalArticle

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