Thermal characterisation of micro-hotplates used in sensor structures

P. Fürjes, Cs Dücs, M. Ádám, J. Zettner, I. Bársony

Research output: Contribution to journalConference article

35 Citations (Scopus)


Micro-hotplates operated at elevated temperature form the basic element in several sensor devices, such as integrated calorimetric or Taguchi-type gas sensors and flow-rate sensors. In all of these applications thermal properties of the sensing elements play a determining role in functional operation, therefore, their accurate characterisation is essential. The micro-hotplates investigated were developed by one side porous silicon micro-machining technology, forming Pt micro-filaments embedded in non-stoichiometric silicon nitride, and suspended across a cavity. This work is dealing with the accurate temperature detection in the micro-scale by different measurement methods for the deduction of steady state and transient thermal properties from the results. Transient properties of the structure were investigated by application of a simplified thermal equivalent circuit model.

Original languageEnglish
Pages (from-to)455-464
Number of pages10
JournalSuperlattices and Microstructures
Issue number3-6
Publication statusPublished - Mar 1 2004
EventEurotherm 75: Microscale Heat Transfer 2 - Reims, France
Duration: Jul 8 2003Jul 10 2003



  • Calorimetric flow sensor
  • Micro-hotplate
  • Pellistor
  • Thermal analysis

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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