Thermal characterisation of a direction dependent flow sensor

Peter Fürjes, Gábor Légrádi, Csaba Dücso, Attila Aszódi, István Bársony

Research output: Contribution to journalArticle

58 Citations (Scopus)


A calorimetric sensor for detection of gas velocity and flow direction was constructed by sacrificial porous silicon micromachining technique. The sensing element contains four temperature sensing resistors arranged symmetrically around a central filament heater. Finite volume flow simulations (FVM) for velocity vector and temperature distribution around the system elements led to the conclusion that the laminar flow conditions, essential for accurate calorimetric sensing, can be maintained by adequate selection of device dimensions and channel depth. Predictions by the flow and thermal simulations were aimed at defining the optimum geometric design. The results of functional tests performed on the fabricated structure were interpreted in terms of changes of parameters in the thermal equivalent circuit of the device.

Original languageEnglish
Pages (from-to)417-423
Number of pages7
JournalSensors and Actuators, A: Physical
Issue number2-3 SPEC. ISS.
Publication statusPublished - Sep 21 2004


  • Calorimetric gas flow sensor
  • Micro-channels
  • Thermal simulation

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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