The use of ion beam techniques for the fabrication of integrated optical elements

I. Banyasz, S. Berneschi, M. Fried, V. Havranek, N. Q. Khanh, G. U L Nagy, A. Nemeth, G. Nunzi-Conti, S. Pelli, I. Rajta, C. Righini, E. Szilágyi, M. Veres, Z. Zolnai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Active and passive optical waveguides are fundamental elements in modern telecommunications systems. A great number of optical crystals and glasses were identified and are used as good optoelectronic materials. However, fabrication of waveguides in some of those materials remains still a challenging task due to their susceptibility to mechanical or chemical damages during processing. Ion beam has been used for such purposes, along with other emerging techniques, like direct pulsed laser writing. Passive and active planar and channel optical waveguides, and optical Bragg gratings were fabricated in various glasses (like Er: TeO2-WO3 glass) and undoped and doped crystals, Bi4Ge3O12, Bi12GeO20) using masked or unmasked macrobeams or microbeams of light and medium-sized ions (C, N, O) in the 1.5 - 11 MeV energy range. Functionality of the optical elements was tested by m-line spectroscopy and end fire coupling technique. Structural changes in the implanted samples were studied by various optical microscopic techniques, spectroscopic ellipsometry, Rutherford backscattering and microscopic Raman spectroscopy. The results show that it is possible to produce integrated optical elements of unique properties using ion beam techniques.

Original languageEnglish
Title of host publication2016 18th International Conference on Transparent Optical Networks, ICTON 2016
PublisherIEEE Computer Society
Volume2016-August
ISBN (Electronic)9781509014675
DOIs
Publication statusPublished - Aug 23 2016
Event18th International Conference on Transparent Optical Networks, ICTON 2016 - Trento, Italy
Duration: Jul 10 2016Jul 14 2016

Other

Other18th International Conference on Transparent Optical Networks, ICTON 2016
CountryItaly
CityTrento
Period7/10/167/14/16

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Keywords

  • channel waveguide
  • focussed ion beam
  • integrated optics
  • ion implantation
  • optical Bragg grating
  • planar waveguide

ASJC Scopus subject areas

  • Computer Networks and Communications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Banyasz, I., Berneschi, S., Fried, M., Havranek, V., Khanh, N. Q., Nagy, G. U. L., Nemeth, A., Nunzi-Conti, G., Pelli, S., Rajta, I., Righini, C., Szilágyi, E., Veres, M., & Zolnai, Z. (2016). The use of ion beam techniques for the fabrication of integrated optical elements. In 2016 18th International Conference on Transparent Optical Networks, ICTON 2016 (Vol. 2016-August). [7550712] IEEE Computer Society. https://doi.org/10.1109/ICTON.2016.7550712