The use of elastic peak spectroscopy in depth profiling

Research output: Contribution to journalArticle

4 Citations (Scopus)
Original languageEnglish
Number of pages1
JournalVacuum
Volume46
Issue number8-10
DOIs
Publication statusPublished - Jan 1 1995

ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

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