Some properties of non-stoichiometric amorphous silicon nitride, SiNx (0 < x < 2.0), prepared by physical vapour deposition in which hydrogen was excluded from the process, were investigated by X-ray fluorescence spectroscopy. The SiKβ and SiKα emission lines were measured. A non-bonding p-type vacancy state on the top upper Si valence band is identified up to the composition x = 1.2. This state was not observed in other studies of hydrogenated SiNx: H systems. The N 2s state derived lower valence band was split from the upper valence band with 2 eV valence band gap. The observed non-linear dependence of the Si p-band on x is inconsistent with a two-phase (Si and Si3N4) linear superposition model of this semiconducting amorphous alloy. The random bonding model is consistent with this dependence.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Ceramics and Composites
- Condensed Matter Physics
- Materials Chemistry