The role of surface steps in the asymmetric surface dislocation nucleation in vicinal heterostructures with compressive and tensile stresses

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Abstract

The surface nucleation of misfit dislocations in vicinal (001)-oriented heterostructures is discussed. It is shown that beside the asymmetrical stressing of opposite dislocation slip planes due to the vicinal substrate, the surface steps have a similar effect. The effect of the steps has the same-sign asymmetry for a compressive stressed epilayer, but is opposite in the tensile case. The effect on dislocation nucleation energy is calculated. For miscut angles used normally, the step energy contribution exceeds that due to the vicinal substrate. The effect on epilayer tilting is also discussed.

Original languageEnglish
JournalSurface Science
Volume292
Issue number3
DOIs
Publication statusPublished - Aug 1 1993

Fingerprint

Epilayers
tensile stress
Compressive stress
Tensile stress
Heterojunctions
Nucleation
nucleation
Substrates
Dislocations (crystals)
slip
asymmetry
energy

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

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abstract = "The surface nucleation of misfit dislocations in vicinal (001)-oriented heterostructures is discussed. It is shown that beside the asymmetrical stressing of opposite dislocation slip planes due to the vicinal substrate, the surface steps have a similar effect. The effect of the steps has the same-sign asymmetry for a compressive stressed epilayer, but is opposite in the tensile case. The effect on dislocation nucleation energy is calculated. For miscut angles used normally, the step energy contribution exceeds that due to the vicinal substrate. The effect on epilayer tilting is also discussed.",
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N2 - The surface nucleation of misfit dislocations in vicinal (001)-oriented heterostructures is discussed. It is shown that beside the asymmetrical stressing of opposite dislocation slip planes due to the vicinal substrate, the surface steps have a similar effect. The effect of the steps has the same-sign asymmetry for a compressive stressed epilayer, but is opposite in the tensile case. The effect on dislocation nucleation energy is calculated. For miscut angles used normally, the step energy contribution exceeds that due to the vicinal substrate. The effect on epilayer tilting is also discussed.

AB - The surface nucleation of misfit dislocations in vicinal (001)-oriented heterostructures is discussed. It is shown that beside the asymmetrical stressing of opposite dislocation slip planes due to the vicinal substrate, the surface steps have a similar effect. The effect of the steps has the same-sign asymmetry for a compressive stressed epilayer, but is opposite in the tensile case. The effect on dislocation nucleation energy is calculated. For miscut angles used normally, the step energy contribution exceeds that due to the vicinal substrate. The effect on epilayer tilting is also discussed.

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